{"product_id":"m05200-semi-m52-130-nm-90nm-65nmおよび45nm技術世代シリコンウェーハ用走査型表面検査装置仕様のためのガイド","title":"M05200 - SEMI M52 - 130 nm，90nm，65nmおよび45nm技術世代シリコンウェーハ用走査型表面検査装置仕様のためのガイド","description":"\u003cp class=\"Indent\" style=\"TEXT-JUSTIFY: inter-ideograph; TEXT-ALIGN: justify; MARGIN: 0in 21pt 0pt\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e本スタンダードは，\u003cspan style=\"mso-fareast-language: JA\"\u003eglobal Silicon Wafer\u003cspan style=\"mso-fareast-language: JA\"\u003e Committee\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eで技術的に承認されている。現版は\u003cspan style=\"mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e2006\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e年\u003cspan style=\"mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e11\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e月\u003cspan style=\"mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e21\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e日および\u003cspan style=\"mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e2007\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e年\u003cspan style=\"mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e1\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e月\u003cspan style=\"mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e18\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e日，\u003cspan style=\"mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003eglobal Audits and Reviews Subcommittee\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003eにて発行が承認された。\u003cspan style=\"mso-fareast-language: JA\"\u003e2007\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"mso-fareast-language: JA\"\u003e2\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月に\u003cspan style=\"mso-fareast-language: JA\"\u003ewww.semi.org\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eで，そして\u003cspan style=\"mso-fareast-language: JA\"\u003e2007\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"mso-fareast-language: JA\"\u003e3\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月に\u003cspan style=\"mso-fareast-language: JA\"\u003eCD-ROM\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eで入手可能となる。初版は\u003cspan style=\"mso-fareast-language: JA\"\u003e2002\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"mso-fareast-language: JA\"\u003e11\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月発行，前版は\u003cspan style=\"mso-fareast-language: JA\"\u003e2006\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"mso-fareast-language: JA\"\u003e7\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月に発行された。\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp class=\"MsoNormal\" style=\"MARGIN: 0in 0in 0pt\"\u003e\u003co:p\u003e\u003cfont size=\"2\"\u003e\u003c\/font\u003e\u003c\/o:p\u003e \u003c\/p\u003e \u003cp class=\"MsoNormal\" style=\"MARGIN: 0in 0in 0pt\"\u003e\u003co:p\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e本ガイドは\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003e130\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e，\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003e90\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e，\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003e65\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e，および\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003e45 nm\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e技術世代における走査型表面検査装置（\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003eScanning Surface Inspection Systems\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e（\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003eSSIS\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e））の推薦仕様を提供するものである。シリコン上の局所光散乱（\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003elocalized light scatterers \u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e（\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003eLLS\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e））の数と大きさはシリコンウェーハの顧客によって指定され，検査証明書（\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003eCertificates of Compliance\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e）に含まれる。シリコンウェーハサプライヤやその顧客は，これらのパラメータを，異なるメーカーの測定システムを使用するか，あるいは同じサプライヤでも異なる世代の測定システムを使用して測定することがある。したがって，そのような測定システムの種々の状況を標準化することにより，データ交換やデータ解釈を容易にし，適切な測定システムの調達を可能とすることができる。\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eSEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers \u003cbr\u003e \u003cfont\u003eSEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II) \u003cbr\u003e \u003cfont\u003eSEMI E10 — Specification for Definition and Measurement of Equipment Reliability, Availability \u003cbr\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI M52-0912 - Superseded","offer_id":40234366435395,"sku":"9636","price":38100.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M52-0412 - Superseded","offer_id":40234366632003,"sku":"9631","price":38100.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M52-0307 - Superseded","offer_id":40234366795843,"sku":"9629","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_0c63e8b6-05ac-49f2-9d16-4707980f4de4.png?v=1776702041","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/m05200-semi-m52-130-nm-90nm-65nm%e3%81%8a%e3%82%88%e3%81%b345nm%e6%8a%80%e8%a1%93%e4%b8%96%e4%bb%a3%e3%82%b7%e3%83%aa%e3%82%b3%e3%83%b3%e3%82%a6%e3%82%a7%e3%83%bc%e3%83%8f%e7%94%a8%e8%b5%b0%e6%9f%bb%e5%9e%8b%e8%a1%a8%e9%9d%a2%e6%a4%9c%e6%9f%bb%e8%a3%85%e7%bd%ae%e4%bb%95%e6%a7%98%e3%81%ae%e3%81%9f%e3%82%81%e3%81%ae%e3%82%ac%e3%82%a4%e3%83%89","provider":"SEMI Dev 2","version":"1.0","type":"link"}