{"product_id":"m04600-semi-m46-test-method-for-measuring-carrier-concentrations-in-epitaxial-layer-structures-by-ecv-profiling","title":"M04600 - SEMI M46 - Test Method for Measuring Carrier Concentrations in Epitaxial Layer Structures by ECV Profiling","description":"\u003cp align=\"justify\" dir=\"ltr\"\u003e　\u003c\/p\u003e\u003cp align=\"justify\" dir=\"ltr\"\u003eNOTICE: This Document was reapproved with minor editorial changes.\u003c\/p\u003e\u003cp align=\"left\" dir=\"ltr\"\u003e\u003cfont size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e\u003cp align=\"justify\" dir=\"ltr\"\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Arial\" size=\"2\"\u003eThe purpose of this Document is to specify a method to measure the carrier concentration and carrier concentration vs. depth profile of epitaxial layers by electrochemical capacitance voltage (ECV) profiling.\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp align=\"justify\" dir=\"ltr\"\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp align=\"justify\" dir=\"ltr\"\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Arial\" size=\"2\"\u003eThis Test Method covers a procedure for measuring the carrier concentration of epitaxial layers by ECV profiling. This method focuses on improving the accuracy and repeatability of the measurement by standardizing the test conditions and reporting and by routine calibration of the measurement.\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp align=\"justify\" dir=\"ltr\"\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp align=\"justify\" dir=\"ltr\"\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Arial\" size=\"2\"\u003eThis Test Method is intended to cover the majority of routine samples measured. However, because of the number of different materials encountered it cannot cover every contingency.\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp align=\"left\" dir=\"ltr\"\u003e \u003c\/p\u003e\u003cp align=\"justify\" dir=\"ltr\"\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Arial\" size=\"2\"\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cp\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Arial\" size=\"2\"\u003eSEMI C1 — Guide for the Analysis of Liquid Chemicals\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI M46-1101E (Reapproved 0915) - Inactive","offer_id":40348665839683,"sku":"4858","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M46-1101E (Reapproved 0309) - Superseded","offer_id":40234300244035,"sku":"9601","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M46-1101E - Superseded","offer_id":40234300375107,"sku":"9600","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_dc13072b-832c-402b-a1f3-36aa355a6ac7.png?v=1776702614","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/m04600-semi-m46-test-method-for-measuring-carrier-concentrations-in-epitaxial-layer-structures-by-ecv-profiling","provider":"SEMI Dev 2","version":"1.0","type":"link"}