{"product_id":"m04000-semi-m40-guide-for-measurement-of-roughness-of-planar-surfaces-on-polished-wafers","title":"M04000 - SEMI M40 - Guide for Measurement of Roughness of Planar Surfaces on Polished Wafers","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Guide incorporates the following methodologies:\u003cbr\u003e \u003c\/p\u003e\u003cp\u003eStandardized scan patterns for both local and full-area surface characterization,\u003cbr\u003eA set of roughness abbreviations that describe measurement conditions in a short-hand code, and\u003cbr\u003eReference test methodologies for three generic types of roughness measuring instruments. These general categories may include, but are not limited to:\u003cbr\u003e• Profilometers — AFM and other scanning probe microscopes; optical profilometers; high-resolution mechanical stylus systems,\u003cbr\u003e• Interferometers — Interference microscopes, and\u003cbr\u003e• Scatterometers — Total integrating scatterometers (TIS), angle-resolved light scatterometers (ARLS), scanning surface inspection systems (SSIS).\u003cbr\u003e \u003c\/p\u003e\u003cp\u003eProcedures to obtain a representative value of roughness for a surface are specified.\u003cbr\u003e \u003c\/p\u003e\u003cp\u003eRoughness nomenclature is intended to remove ambiguities with respect to identifying the roughness measurements used and the results achieved.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards \u003c\/strong\u003e(purchase separately)\u003cbr\u003eSEMI E89 — Guide for Measurement System Analysis (MSA)\u003cbr\u003eSEMI HB1 — Specification for Sapphire Wafers Intended for Use for Manufacturing High Brightness-Light Emitting Diode Devices\u003cbr\u003eSEMI M1 — Specification for Polished Single Crystal Silicon Wafers\u003cbr\u003eSEMI M20 — Practice for Establishing a Wafer Coordinate System\u003cbr\u003eSEMI M50 — Test Method for Determining Capture Rate and False Count Rate for Surface Scanning Inspection Systems by the Overlay Method\u003cbr\u003eSEMI M52 — Guide for Specifying Scanning Surface Inspection Systems for Silicon Wafers for the 130 nm to 11 nm Technology Generations\u003cbr\u003eSEMI M53 — Practice for Calibrating Scanning Surface Inspection Systems Using Certified Depositions of Monodisperse Reference Spheres on Unpatterned Semiconductor Wafer Surfaces\u003cbr\u003eSEMI M58 — Test Method for Evaluating DMA Based Particle Deposition Systems and Processes\u003cbr\u003eSEMI M59 — Terminology for Silicon Technology\u003cbr\u003eSEMI ME1392 — Guide for Angle Resolved Optical Scatter Measurements on Specular or Diffuse Surfaces\u003cbr\u003eSEMI MF1048 — Test Method for Measuring the Effective Surface Roughness of Optical Components by Total Integrated Scattering\u003cbr\u003eSEMI MF1811 — Guide for Estimating the Power Spectral Density Function and Related Finish Parameters from Surface Profile Data\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI M40-1114 (Reapproved 1023)\u003cbr\u003eSEMI M40-1114 (technical revision)\u003cbr\u003eSEMI M40-1109 (technical revision)\u003cbr\u003eSEMI M40-0200 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI M40-1114 (Reapproved 1023) - Current","offer_id":43106893070403,"sku":"17212","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M40-1114 - Superseded","offer_id":43106893103171,"sku":"4848","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M40-1109 - Superseded","offer_id":40234285989955,"sku":"9582","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M40-0200 - Superseded","offer_id":40234286055491,"sku":"9581","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_43b4abff-6df7-4e6e-868b-def39e3b6367.png?v=1776702622","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/m04000-semi-m40-guide-for-measurement-of-roughness-of-planar-surfaces-on-polished-wafers","provider":"SEMI Dev 2","version":"1.0","type":"link"}