{"product_id":"m04000-semi-m40-シリコンウェーハ表面のラフネス測定のガイド","title":"M04000 - SEMI M40 - シリコンウェーハ表面のラフネス測定のガイド","description":"\u003cp class=\"Indent\" style=\"TEXT-JUSTIFY: inter-ideograph; MARGIN: 0in 21pt 0pt; TEXT-ALIGN: justify\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e本スタンダードは，\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003eglobal \u003cspan style=\"COLOR: black\"\u003eSilicon Wafer\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e Committee\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eで技術的に承認されている。現版は\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e2009\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e9\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e4\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e日，\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003eglobal Audits and Reviews Subcommittee\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eにて発行が承認された。\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e2009\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e10\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月に\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003ewww.semi.org\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eで，そして\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e2009\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e11\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月に\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003eCD-ROM\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eで入手可能となる。初版は\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e2000\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e2\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月に発行された。\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp class=\"MsoNormal\" style=\"MARGIN: 0in 0in 0pt\"\u003e\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \u003ch2 style=\"MARGIN: 3pt 0in; TEXT-INDENT: 0in\"\u003e\u003cspan style=\"COLOR: black; mso-fareast-language: JA; mso-fareast-font-family: 'Times New Roman'\"\u003e\u003cspan style=\"mso-list: Ignore\"\u003e\u003cspan style=\"FONT: 7pt 'Times New Roman'\"\u003e  \u003ch2 style=\"MARGIN: 3pt 0in\"\u003e\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003eこのガイドは，シリコンウェーハの表面ラフネスの特徴を調べ，報告するのに使用する測定方法を規定する手順を記述する。それは，さらに他のタイプの平面ウェーハ材料にも適用できる。\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-bidi-font-weight: bold\"\u003eSEMI M1\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003eに規定されているようなシリコンウェーハの研磨された表面のラフネスは一般にマイクロラフネス領域にあることに注意をすべきである。\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-bidi-font-weight: bold\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/h2\u003e \u003ch2 style=\"MARGIN: 3pt 0in\"\u003e\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; mso-bidi-font-weight: bold\"\u003e \u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/h2\u003e \u003ch2 style=\"MARGIN: 3pt 0in\"\u003e\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003eこのガイドは，\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-bidi-font-weight: bold\"\u003e3\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003eつの重要な方法を使用するラフネスの決定に関する用語および手順を提供する。\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-bidi-font-weight: bold\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/h2\u003e \u003ch3 style=\"MARGIN: 3pt 0in\"\u003e\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-weight: bold\"\u003e標準化走査個所パターン\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-bidi-font-weight: bold\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/h3\u003e \u003ch3 style=\"MARGIN: 3pt 0in\"\u003e\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-weight: bold\"\u003eラフネスの略語\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-bidi-font-weight: bold\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/h3\u003e \u003ch3 style=\"MARGIN: 3pt 0in\"\u003e\u003cspan lang=\"JA\" style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-weight: bold\"\u003e特定のラフネス測定の識別に関しての参考試験方法\u003cspan style=\"FONT-WEIGHT: normal; FONT-SIZE: 10pt; COLOR: black; mso-bidi-font-weight: bold\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/h3\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/h2\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eSEMI E89 — Guide for Measurement System Analysis (MSA) \u003cbr\u003e \u003cfont\u003eSEMI M1 — Specifications for Polished Single Crystal Silicon Wafers \u003cbr\u003e \u003cfont\u003eSEMI M20 — Practice for Establishing a Wafer Coordinate System \u003cbr\u003e \u003cfont\u003eSEMI M50 — Test Method for Determining Capture Rate and False Count Rate \u003cbr\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI M40-1109 - Superseded","offer_id":40234292904003,"sku":"4847","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_17a6e9e4-349b-4df4-b7a9-600f91fe6012.png?v=1776702623","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/m04000-semi-m40-%e3%82%b7%e3%83%aa%e3%82%b3%e3%83%b3%e3%82%a6%e3%82%a7%e3%83%bc%e3%83%8f%e8%a1%a8%e9%9d%a2%e3%81%ae%e3%83%a9%e3%83%95%e3%83%8d%e3%82%b9%e6%b8%ac%e5%ae%9a%e3%81%ae%e3%82%ac%e3%82%a4%e3%83%89","provider":"SEMI Dev 2","version":"1.0","type":"link"}