{"product_id":"m03500-semi-m35-guide-for-developing-specifications-for-silicon-wafer-surface-features-detected-by-automated-inspection","title":"M03500 - SEMI M35 - Guide for Developing Specifications for Silicon Wafer Surface Features Detected by Automated Inspection","description":"\u003cp style=\"text-align:justify;\" dir=\"ltr\"\u003e \u003c\/p\u003e\u003cp style=\"text-align:justify;\" dir=\"ltr\"\u003e\u003cspan style=\"background-color:rgb(255,255,255);color:rgb(38,38,38);\"\u003e\u003cspan style=\"-webkit-text-stroke-width:0px;display:inline !important;float:none;font-family:Arial, Helvetica, sans-serif;font-size:13px;font-style:normal;font-variant-caps:normal;font-variant-ligatures:normal;font-weight:400;letter-spacing:normal;orphans:2;text-align:left;text-decoration-color:initial;text-decoration-style:initial;text-decoration-thickness:initial;text-indent:0px;text-transform:none;white-space:normal;widows:2;word-spacing:0px;\"\u003e\u003cstrong\u003e* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version.\u003c\/strong\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp style=\"text-align:justify;\" dir=\"ltr\"\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  Inspection of silicon wafer surfaces is a standard outgoing test on all commercially sold silicon wafers.\u003cbr\u003e1.2  Older specifications referred to visual inspection of wafer surfaces, but with advanced technologies, the sizes of many important surface features are too small to be seen visually and so other types of surface inspection become necessary.\u003cbr\u003e1.3  This Guide provides a specification framework for reporting measurements of silicon wafer surface features through the use of scanning (or automated) surface inspection systems (SSIS).\u003cbr\u003e2  Scope\u003cbr\u003e2.1  This Guide addresses specifications related to localized light scatterers (LLSs) as well as extended light scatterers (XLSs). Examples of LLSs are particles and pits. Examples of XLSs are scratches and regions of high roughness (surface haze). Illustrative examples of many of the features discussed in this Guide may be found in SEMI MF154.\u003cbr\u003e2.2  Surface scanners, which have discriminated between XLSs and LLSs for several years, are now discriminating (and selectively reporting) between different types of LLSs (e.g., pits and particles).\u003cbr\u003e2.3  Specific numbers limiting feature levels and\/or densities are to be agreed upon between suppliers and customers. This Guide provides a framework for that communication that result in specifications flexible enough to accommodate variations in measurement due to different SSIS models.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards \u003c\/strong\u003e(purchase separately)\u003cbr\u003eSEMI M53 — Practice for Calibrating Scanning Surface Inspection Systems using Depositions of Monodisperse Polystyrene Latex Sphere on Unpatterned Semiconductor Wafer Surfaces\u003cbr\u003eSEMI M59 — Terminology for Silicon Technology\u003cbr\u003eSEMI MF154 — Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI M35-0525 (technical revision)\u003cbr\u003eSEMI M35-1114 (Reapproved 1019)\u003cbr\u003eSEMI M35-1114 (technical revision)\u003cbr\u003eSEMI M35-1107 (technical revision)\u003cbr\u003eSEMI M35-1105 (technical revision)\u003cbr\u003eSEMI M35-1104 (technical revision)\u003cbr\u003eSEMI M35-0299E (editorial revision)\u003cbr\u003eSEMI M35-0299 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI M35-0525 - Current","offer_id":43106893201475,"sku":"18477","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M35-0525 - Current + Redline","offer_id":43106893234243,"sku":"18478","price":38900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M35-1114 (Reapproved 1019) - Superseded","offer_id":43106893267011,"sku":"13571","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M35-1114 - Superseded","offer_id":40234306568259,"sku":"4845","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M35-1107 - Superseded","offer_id":40234306666563,"sku":"9567","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M35-1105 - Superseded","offer_id":40234306764867,"sku":"9566","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M35-1104 - Superseded","offer_id":40234306830403,"sku":"9565","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_3ed77cce-8342-46cd-b17b-ee4e737cd77b.png?v=1776702624","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/m03500-semi-m35-guide-for-developing-specifications-for-silicon-wafer-surface-features-detected-by-automated-inspection","provider":"SEMI Dev 2","version":"1.0","type":"link"}