{"product_id":"m03100-semi-m31-specification-for-mechanical-features-of-front-opening-shipping-box-used-to-transport-and-ship-300-mm-wafers","title":"M03100 - SEMI M31 - Specification for Mechanical Features of Front-Opening Shipping Box Used to Transport and Ship 300 mm Wafers","description":"\u003cp\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e\u003cstrong\u003eNOTICE: \u003c\/strong\u003eThis Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThis Standard specifies the front-opening shipping box (FOSB) used to ship 300 mm wafers from wafer suppliers to their customers (typically IC manufacturers), while maintaining wafer quality.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThis Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. However, this Standard has been written so that injection-molded plastic FOSBs can be manufactured in conformance with it, and those can be utilized for maintaining wafers quality during transportation, opening, and closing the door.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThis Standard assumes that the FOSB is used in the last process in wafer manufacturing, in acceptance and inspection, and in transferring the wafers from the FOSB to a front-opening unified pod (FOUP), front-opening box for interfactory transport (FOBIT) or open cassette inside an IC manufacturing facility. The FOSB is not intended to be used in IC manufacturing processes. It is recommended that wafers be transferred from the FOSB to a FOUP, FOBIT or open cassette using automated methods. As described in ¶ 5.4, the purchaser needs to specify which type of FOSB door is required:\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cul\u003e\n\u003cli class=\"MsoNormal\"\u003e\n\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eManual door as described in ¶ 5.4.1; or\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\n\u003c\/li\u003e\n\u003cli class=\"MsoNormal\"\u003e\n\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eAutomated-shippable door as described in ¶ 5.4.2.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\u003cp class=\"MsoNormal\"\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E15 — Specification for Tool Load Port\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E15.1 — Specification for 300 mm Tool Load Port\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E47.1 — Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E57 — Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M45 — Specification for 300 mm Wafer Shipping System\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M31-0718 (technical revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M31-0708 (technical revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M31-0307 (technical revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M31-0706 (technical revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M31-0306 (technical revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M31-1105 (technical revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M31-0705 (technical revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M31-0305 (technical revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M31-1104 (technical revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M31-1103E (editorial revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M31-1103 (technical revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M31-0303 (technical revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M31-0999 (technical revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M31-0699 (technical revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M31-0299 (technical revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M31-0698 (first published)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI M31-0718 - Inactive","offer_id":43106893299779,"sku":"4843","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M31-0708 - Superseded","offer_id":40234286481475,"sku":"9553","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M31-0307 - Superseded","offer_id":40234286547011,"sku":"9550","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M31-0706 - Superseded","offer_id":40234286579779,"sku":"9552","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M31-0306 - Superseded","offer_id":40234286612547,"sku":"9549","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M31-1105 - Superseded","offer_id":40234286645315,"sku":"9556","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M31-0305 - Superseded","offer_id":40234286678083,"sku":"9548","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M31-0705 - Superseded","offer_id":40234286710851,"sku":"9551","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M31-1104 - Superseded","offer_id":40234286743619,"sku":"9555","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_305366d5-c527-488d-941a-66b723c93315.png?v=1776702626","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/m03100-semi-m31-specification-for-mechanical-features-of-front-opening-shipping-box-used-to-transport-and-ship-300-mm-wafers","provider":"SEMI Dev 2","version":"1.0","type":"link"}