{"product_id":"m02400-semi-m24-鏡面単結晶プレミアムシリコンウェーハの仕様","title":"M02400 - SEMI M24 - 鏡面単結晶プレミアムシリコンウェーハの仕様","description":"\u003cp class=\"Indent\" style=\"TEXT-JUSTIFY: inter-ideograph; TEXT-ALIGN: justify; MARGIN: 0in 21pt 0pt\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e\u003cfont size=\"2\"\u003e本スタンダードは，\u003cfont size=\"2\"\u003e\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003eglobal Silicon Wafer\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e Committee\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eで技術的に承認されている。現版は\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e2006\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e年\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e11\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e月\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e21\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003e日，\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003eglobal Audits and Reviews Subcommittee\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-size: 9.0pt\"\u003eにて発行が承認された。\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e2007\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e2\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月に\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003ewww.semi.org\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eで，そして\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e2007\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e3\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月に\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003eCD-ROM\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eで入手可能となる。初版は\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e1994\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年発行，前版は\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e2005\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e11\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月に発行された。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e \u003cp style=\"TEXT-JUSTIFY: inter-ideograph; TEXT-ALIGN: justify; MARGIN: 0in 21pt 0pt\" class=\"Indent\"\u003e\u003cfont size=\"2\"\u003e\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\" lang=\"JA\"\u003e\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e \u003cp class=\"MsoNormal\" style=\"MARGIN: 0in 0in 0pt\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003cfont size=\"2\"\u003e\u003c\/font\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \u003ch2 style=\"TEXT-INDENT: 0in; MARGIN: 3pt 0in\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e \u003ch2 style=\"MARGIN: 3pt 0in\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e本文書が規定するのは，半導体製造工程中におけるパーティクルカウンティング，金属汚染モニター，そしてフォトリソ工程中のパターン解像度測定に使用する公称径\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003e\u003cfont face=\"Times New Roman\"\u003e150\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003e～\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003e\u003cfont face=\"Times New Roman\"\u003e300 mm\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-weight: bold\"\u003eの未使用プレミアムシリコンウェーハの要求仕様である。プレミアムウェーハは，上記応用のためいくつかの項目においてより厳しい規格値を持ち，その他の項目ではプライムウェーハと同等かより緩やかな規格値を有する。\u003cspan style=\"FONT-SIZE: 10pt; FONT-WEIGHT: normal; mso-bidi-font-weight: bold\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/h2\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/h2\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eSEMI M1 — Specifications for Polished Mono-crystalline Silicon Wafers \u003cbr\u003e \u003cfont\u003eSEMI M18 — Guide for Developing Specification Forms for Order Entry of Silicon Wafers \u003cbr\u003e \u003cfont\u003eSEMI M45 — Provisional Specification for 300 mm Wafer Shipping System \u003cbr\u003e \u003cfont\u003eSEMI M59 — Terminology for Silicon Technology \u003cbr\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/span\u003e","brand":"semi.org","offers":[{"title":"SEMI M24-0612 - Inactive","offer_id":40234366730307,"sku":"9536","price":38100.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M24-0307 - Superseded","offer_id":40234366861379,"sku":"9534","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_4a12f250-775d-48ab-b296-c56e4b2d0fab.png?v=1776702061","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/m02400-semi-m24-%e9%8f%a1%e9%9d%a2%e5%8d%98%e7%b5%90%e6%99%b6%e3%83%97%e3%83%ac%e3%83%9f%e3%82%a2%e3%83%a0%e3%82%b7%e3%83%aa%e3%82%b3%e3%83%b3%e3%82%a6%e3%82%a7%e3%83%bc%e3%83%8f%e3%81%ae%e4%bb%95%e6%a7%98","provider":"SEMI Dev 2","version":"1.0","type":"link"}