{"product_id":"m02100-semi-m21-guide-for-assigning-addresses-to-rectangular-elements-in-a-cartesian-array","title":"M02100 - SEMI M21 - Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eIt is frequently very useful to have a standardized method for labeling elements in an array on a silicon wafer surface.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eThis Guide defines an element addressing convention for locating and uniquely identifying rectangular elements in a Cartesian array.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eSuch arrays are useful in locating sites for site flatness characterization, defect mapping, determination of parametric distributions, etc. on unpatterned semiconductor wafers.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eThis Guide covers procedures for assigning addresses that can be used to locate and identify rectangular elements in a Cartesian array. The array may be regular or tiled in one direction.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eRelating the position of the array to the wafer surface is outside the scope of this Guide, but it may be established through use of the wafer coordinate system defined in SEMI M20.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eThis Guide covers procedures for assigning a unique identification (address) for each element in the array. An example of the results obtained by following this procedure are given in Related Information 1.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eThe element addressing convention in this Guide provides an orderly progression along perpendicular directions with addresses of adjacent elements in any direction differing by one. Consequently, distances may be calculated in a unified way.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eFor complex patterns, more than one array on a wafer may be defined and related to the same coordinate axes.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eSEMI M17 — Guide for a Universal Wafer Grid\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eSEMI M20 — Practice for Establishing a Wafer Coordinate System\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eSEMI M59 — Terminology of Silicon Technology\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eSEMI M21-0318 (Reapproved 0923)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eSEMI M21-0318 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eSEMI M21-1110 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eSEMI M21-0304 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eSEMI M21-0998 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Microsoft Sans Serif\",sans-serif;font-size:9.5pt;'\u003eSEMI M21-92 (first published)\u003c\/span\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI M21-0318 (Reapproved 0923) - Current","offer_id":43106893398083,"sku":"17150","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M21-0318 - Superseded","offer_id":43106893430851,"sku":"4841","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M21-1110 - Superseded","offer_id":40234300604483,"sku":"9526","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M21-0304 - Superseded","offer_id":40234300637251,"sku":"9525","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_3f918a6a-3b07-4958-8463-39ebbef1c8f3.png?v=1776702627","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/m02100-semi-m21-guide-for-assigning-addresses-to-rectangular-elements-in-a-cartesian-array","provider":"SEMI Dev 2","version":"1.0","type":"link"}