{"product_id":"m01300-semi-m13-specification-for-alphanumeric-marking-of-silicon-wafers","title":"M01300 - SEMI M13 - Specification for Alphanumeric Marking of Silicon Wafers","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThis Specification describes an alphanumeric marking system for silicon wafers. The marking code includes information on the origin, approximate resistivity, dopant species, and crystal growth orientation in addition to a wafer identification number. Use of this Specification ensures the consistency of all wafer marking performed by silicon manufacturers. This consistency allows simplification of the performance requirements of automatic optical character reading (OCR) equipment. In addition, the alphanumeric character size provides for human readability of the mark.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eBy defining the basic code used to characterize the individual wafer, this Specification provides the information needed for practical operator interpretation.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThe alphanumeric marking of this Specification is valid for a broad range of wafer products (e.g., polished, epi, SOI, in-process, and patterned wafers, etc.).\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThis Specification defines the character set, location, and associated dimensions and tolerances of an alphanumeric code, specifically for identification of flatted and notched silicon wafers.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThis Specification does not address the marking techniques that may be employed when complying with this Standard.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M1 — Specification for Polished Single Crystal Silicon Wafers\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M20 \u003c\/span\u003e\u003ca name=\"_Hlk81467252\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e— Pra\u003c\/span\u003e\u003c\/a\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003ectice for Establishing a Wafer Coordinate System\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M13-0523 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M13-0706 (Reapproved 0318)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M13-0706 (Reapproved 1011)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M13-0706 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M13-1103 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M13-0998E (editorial revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M13-0998 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M13-88 (first published - previously designated M1.1-88)\u003c\/span\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI M13-0523 - Current","offer_id":43106893463619,"sku":"16529","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M13-0706 (Reapproved 0318) - Superseded","offer_id":43106893496387,"sku":"4835","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M13-0706 (Reapproved 1011) - Superseded","offer_id":40234307420227,"sku":"9498","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M13-0706 - Superseded","offer_id":40234307485763,"sku":"9496","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI M13-1103 - Superseded","offer_id":40234307584067,"sku":"9500","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_b20a6249-7b61-4ad9-a6dc-5b68d3495e18.png?v=1776702632","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/m01300-semi-m13-specification-for-alphanumeric-marking-of-silicon-wafers","provider":"SEMI Dev 2","version":"1.0","type":"link"}