{"product_id":"m01200-semi-m12-specification-for-serial-alphanumeric-marking-of-the-front-surface-of-wafers","title":"M01200 - SEMI M12 - Specification for Serial Alphanumeric Marking of Silicon Wafers","description":"\u003cp style=\"text-align:justify;\" dir=\"ltr\"\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThis Specification describes a coded alphanumeric marking of silicon or other semiconductor wafers. The wafer alphanumeric code links the properties of the wafer stored in an appropriate database system to each individual wafer for purposes of tracking and control during wafer and device manufacture. Use of this Specification ensures the consistency of all wafers marking performed by silicon manufacturers. This consistency allows simplification of the performance requirements of automatic optical character reading (OCR) equipment. In addition, the alphanumeric character size provides for human readability of the mark.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eBy defining the basic code used for the mark, this Specification provides the information needed, by human or machine vision, for practical operator interpretation and wafer tracking.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThe alphanumeric marking of this Specification is valid for a broad range of wafer products (e.g., polished, epi, SOI, in-process and patterned wafers, etc.).\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThis Specification defines the geometric and spatial limits of the alphanumeric code, specifically for serial identification of flatted and notched silicon wafers.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThis Specification does NOT address the marking techniques that may be employed when complying with this Standard.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThis Specification does not address coding of wafer crystal properties that are provided in SEMI M13.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M1 — Specification for Polished Single Crystal Silicon Wafers\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M13 — Specification for Alphanumeric Marking of Silicon Wafers with Crystal Properties\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M20 — Practice for Establishing a Wafer Coordinate System\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M12-0523 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M12-0706 (Reapproved 0318)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M12-0706 (Reapproved 1011)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M12-0706 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M12-1103 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M12-0303 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M12-0998E (editorial revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M12-0998 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M12-92 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M12-89 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M12-88 (first published)\u003c\/span\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI M12-0523 - 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