{"product_id":"m00400-semi-m4-specifications-for-sos-epitaxial-wafers","title":"M00400 - SEMI M4 - Specifications for SOS Epitaxial Wafers","description":"\u003cp\u003e\u003cfont face=\"Microsoft Sans Serif\" size=\"2\"\u003eThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits \u0026amp; Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007. Originally published in 1978; previously published November 2003. \u003c\/font\u003e\u003c\/p\u003e \u003cp\u003e\u003cfont face=\"Microsoft Sans Serif\" size=\"2\"\u003e \u003c\/font\u003e\u003c\/p\u003e \u003cp\u003e\u003cfont face=\"Microsoft Sans Serif\" size=\"2\"\u003eNOTICE: This document was balloted and approved for withdrawal in 2007. \u003c\/font\u003e\u003c\/p\u003e \u003cp\u003e\u003cfont face=\"Microsoft Sans Serif\" size=\"2\"\u003e \u003c\/font\u003e\u003c\/p\u003e \u003cp\u003e\u003cfont face=\"Microsoft Sans Serif\" size=\"2\"\u003eThese specifications cover requirements for monocrystalline silicon epitaxial layers on sapphire substrates, used for semiconductor device manufacture. The combination of a silicon epitaxial layer on a sapphire substrate is known as a silicon on sapphire (SOS) epitaxial wafer. By outlining an inspection process and defining various reject criteria, both suppliers and purchasers can uniformly define epitaxial layer quality. \u003c\/font\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eSEMI M3 — Specifications for Polished Monocrystalline Sapphire Substrates \u003cbr\u003e \u003cfont\u003eSEMI MF81 — Test Method for Measuring Radial Resistivity Variation on Silicon Wafers \u003cbr\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI M4-1103 (Withdrawn 0307) - Withdrawn - Historical","offer_id":40234361618499,"sku":"9580","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_3a829556-70f4-429e-ad4c-865dfa23c002.png?v=1776702046","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/m00400-semi-m4-specifications-for-sos-epitaxial-wafers","provider":"SEMI Dev 2","version":"1.0","type":"link"}