{"product_id":"m00300-semi-m3-specifications-for-polished-monocrystalline-sapphire-substrates","title":"M00300 - SEMI M3 - Specifications for Polished Monocrystalline Sapphire Substrates","description":"\u003cp\u003e\u003cfont face=\"Microsoft Sans Serif\" size=\"2\"\u003eThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits \u0026amp; Reviews Subcommittee on April 25, 2007. It was available at www.semi.org in June 2007. Originally published in 1978; previously published March 2004. \u003c\/font\u003e\u003c\/p\u003e \u003cp\u003e\u003cfont face=\"Microsoft Sans Serif\" size=\"2\"\u003e \u003c\/font\u003e\u003c\/p\u003e \u003cp\u003e\u003cfont face=\"Microsoft Sans Serif\" size=\"2\"\u003eNOTICE: This document was balloted and approved for withdrawal in 2007. \u003c\/font\u003e\u003c\/p\u003e \u003cp\u003e\u003cfont face=\"Microsoft Sans Serif\" size=\"2\"\u003e \u003c\/font\u003e\u003c\/p\u003e \u003cp\u003e\u003cfont face=\"Microsoft Sans Serif\" size=\"2\"\u003eSapphire substrates are utilized for heteroepitaxial growth of silicon films for certain types of device structures. The properties of the films depend in part on the properties of the substrate used. These specifications are intended to provide specifications for the criteria necessary for growth of films suitable for device production. \u003c\/font\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eSEMI M1 — Specifications for Polished Monocrystalline Silicon Wafers \u003cbr\u003e \u003cfont\u003eSEMI MF26 — Test Methods for Determining the Orientation of a Semiconductive Single Crystal \u003cbr\u003e \u003cfont\u003eSEMI MF523 — Practice for Unaided Visual Inspection of Polished Silicon Wafer Surfaces \u003cbr\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI M3-0304 (Withdrawn 0707) - Withdrawn - Historical","offer_id":40234361716803,"sku":"9546","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/MVolume_033a4bd5-e842-4bf2-8036-289eaf757f20.png?v=1776702057","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/m00300-semi-m3-specifications-for-polished-monocrystalline-sapphire-substrates","provider":"SEMI Dev 2","version":"1.0","type":"link"}