{"product_id":"g08200-semi-g82-specification-for-300-mm-load-port-for-frame-cassettes-in-backend-process","title":"G08200 - SEMI G82 - Specification for 300 mm Load Port for Frame Cassettes in Backend Process","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThis Specification defines dimensional requirements for the\nload port of frame cassette for 300 mm wafer in backend process equipment. It\nis intended to promote a uniform physical interface between equipment and the\nfactory, to facilitate the use of automated frame cassette transport systems,\nand\/or to meet ergonomic requirements for manually loaded equipment.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThis is a Standard covering equipment for 300 mm frame\ncassette only.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI E15 — Specification for Tool Load Port\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI E15.1 — Specification for 300 mm Tool Load Port\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI E64 — Specification for 300 mm Cart to SEMI E15.1\nDocking Interface Port\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI G77 — Specification for Frame Cassette for 300 mm\nWafers\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eRevision History\u003c\/b\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\" style=\"margin-top:5.0pt;margin-right:0in;margin-bottom:5.0pt;\nmargin-left:0in;line-height:normal;mso-layout-grid-align:none;text-autospace:\nnone\"\u003e\u003cspan style='font-size:10.0pt;font-family:\"Arial\",sans-serif'\u003eSEMI G82-1115 (Reapproved 1220)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\" style=\"margin-top:5.0pt;margin-right:0in;margin-bottom:5.0pt;\nmargin-left:0in;line-height:normal;mso-layout-grid-align:none;text-autospace:\nnone\"\u003e\u003cspan style='font-size:10.0pt;font-family:\"Arial\",sans-serif'\u003eSEMI G82-1115 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\" style=\"margin-top:5.0pt;margin-right:0in;margin-bottom:5.0pt;\nmargin-left:0in;line-height:normal;mso-layout-grid-align:none;text-autospace:\nnone\"\u003e\u003cspan style='font-size:10.0pt;font-family:\"Arial\",sans-serif'\u003eSEMI G82-0301E (Reapproved 0706)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\" style=\"margin-top:5.0pt;margin-right:0in;margin-bottom:5.0pt;\nmargin-left:0in;line-height:normal;mso-layout-grid-align:none;text-autospace:\nnone\"\u003e\u003cspan style='font-size:10.0pt;font-family:\"Arial\",sans-serif'\u003eSEMI G82-0301E (editorial revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\" style=\"margin-top:5.0pt;margin-right:0in;margin-bottom:5.0pt;\nmargin-left:0in;line-height:normal;mso-layout-grid-align:none;text-autospace:\nnone\"\u003e\u003cspan style='font-size:10.0pt;font-family:\"Arial\",sans-serif'\u003eSEMI G82-0301 (first published)\u003c\/span\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI G82-1115 (Reapproved 1220) - Current","offer_id":40234291920963,"sku":"14345","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI G82-1115 - Superseded","offer_id":40234291953731,"sku":"4281","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI G82-0301E (Reapproved 0706) - Superseded","offer_id":40234291986499,"sku":"12263","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI G82-0301E - Superseded","offer_id":40234292052035,"sku":"12304","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI G82-0301 - Superseded","offer_id":40234292117571,"sku":"14346","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/GVolume_463b8696-e19d-4555-9de3-ae7edc6510f0.png?v=1776702669","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/g08200-semi-g82-specification-for-300-mm-load-port-for-frame-cassettes-in-backend-process","provider":"SEMI Dev 2","version":"1.0","type":"link"}