{"product_id":"f11800-semi-f118-guide-for-drain-segregation-for-semiconductor-manufacturing-tools-to-support-site-water-reuse","title":"F11800 - SEMI F118 - Test Method for Determination of Moisture Dry-Down Characteristics of Gas Delivery Components","description":"\u003cbr\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThis Test Method describes the procedure for determination\nof the moisture dry-down characteristics of components used in gas delivery\nsystems. The results of this test can be used for the qualitative ranking of\ngas delivery components based on the design as it relates to moisture dry-down\nperformance of the system.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThis Test Method applies to all types of in-line components\nused in gas delivery systems for precise delivery of gaseous species used in\nsemiconductor manufacturing. The in-line components applicable are valves\n(pneumatic, manual and hybrid types), mass flow controllers (MFCs), pressure\nregulators, filters and passive components such as pressure gauges\/transducers\nand flow meters.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eTest Medium — The test medium shall be nitrogen. Other\ninert gases will have different purging characteristics and may dry a system\nmore quickly or slowly. Reactive gases shall not be used as they may react\nchemically with moisture. Considerations relating to corrosion resistance are\noutside the scope of the present Standard, although the test procedure may\nprove useful in corrosion studies. The results will provide a ranking with respect\nto moisture contribution arising as a result of differences in design.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eOperating Situations — Moisture contribution from a gas\ndelivery component may be the result of improper design and construction,\ncontamination arising in its manufacture, or from subsequent exposure to\nambient air or non-dry gas. Thus, it is necessary to consider two main\nsituations:\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThe ‘initial dry-down’ situation, which is determined by\nthe moisture content of the component in the as-received condition, with the\neffects of manufacturing process and design, surface quality, pre-treatment and\npackaging convoluted together. This test is optional and may be omitted based\non the objective of the testing.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eThe ‘response to an upset’ situation, which is determined\nby the amount of moisture taken up by the component and subsequently released\nin any exposure after receipt during its operation independently or as part of\na gas delivery system.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e (purchase separately)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI C15 — Test Method for ppm and ppb Humidity Standards\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eRevision History\u003c\/b\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI F118-1121 (first published – replaces SEMI C91)\u003c\/span\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI F118-1121 - Current","offer_id":40234376986691,"sku":"14778","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_512de2d2-d1c4-40cb-8988-3721e55ba748.png?v=1776701662","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f11800-semi-f118-guide-for-drain-segregation-for-semiconductor-manufacturing-tools-to-support-site-water-reuse","provider":"SEMI Dev 2","version":"1.0","type":"link"}