{"product_id":"f11200-semi-f112-test-method-for-determination-of-moisture-dry-down-characteristics-of-surface-mounted-and-conventional-gas-delivery-systems-by-cavity-ring-down-spectroscopy-crds","title":"F11200 - SEMI F112 - Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Cavity Ring Down Spectroscopy (CRDS)","description":"\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003eThis Document describes the procedure for\ndetermination of the moisture dry-down characteristics (quantity of removable\nmoisture) of surface mount (integrated gas delivery systems) and conventional\ngas delivery systems using cavity ring down spectroscopy (CRDS) analyzers.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\n\n\n\n\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cfont size=\"2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-bidi-font-weight:bold'\u003eThe results of this test can be used for qualitative\nranking of gas delivery \u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-fareast-font-family:Batang;mso-fareast-language:KO;mso-bidi-font-weight:\nbold'\u003esystem \u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-bidi-font-weight:\nbold'\u003ebased on the design. It can also be used by a sufficiently sophisticated\nuser as input for numerical simulation of \u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-fareast-font-family:Batang;mso-fareast-language:KO;mso-bidi-font-weight:\nbold'\u003ea gas \u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-bidi-font-weight:\nbold'\u003edistribution system behavior.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e\u003cfont face=\"arial\" size=\"2\"\u003e\u003cb style=\"\"\u003eReferenced SEMI Standards \u003c\/b\u003e(purchase separately)\u003c\/font\u003e\u003cbr\u003e\u003cp\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-bidi-font-weight:\nbold'\u003e\u003cfont size=\"2\"\u003eSEMI C15 — Test Method for ppm and ppb Humidity Standards\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"StdsText\"\u003e\u003cfont size=\"2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-bidi-font-weight:\nbold'\u003eSEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping\nSystems and Components\u003c\/span\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e \u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI F112-0820 - Current","offer_id":40234254434371,"sku":"14187","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F112-0613 - Superseded","offer_id":40234254663747,"sku":"4046","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_7c746dd1-3090-40d6-aaf3-4e7f5c244c09.png?v=1776702752","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f11200-semi-f112-test-method-for-determination-of-moisture-dry-down-characteristics-of-surface-mounted-and-conventional-gas-delivery-systems-by-cavity-ring-down-spectroscopy-crds","provider":"SEMI Dev 2","version":"1.0","type":"link"}