{"product_id":"f10600-semi-f106-test-method-for-determination-of-leak-integrity-of-gas-delivery-systems-by-helium-leak-detector","title":"F10600 - SEMI F106 - Test Method for Determination of Leak Integrity of Gas Delivery Systems by Helium Leak Detector","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the global Facilities Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 30, 2012. Available at www.semiviews.org and www.semi.org in October 2012; originally published March 2008.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Document defines the inboard helium leak test method for gas delivery systems.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eIt covers both conventional metal face sealing and surface mount gas delivery systems.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe test method applies to all types of high purity gas delivery system used in semiconductor manufacturing facilities and comparable research and development areas.\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI F106-0308 (Reapproved 1012) - Inactive","offer_id":40234347397187,"sku":"10985","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F106-0308 - Superseded","offer_id":40234347495491,"sku":"10750","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_c863941d-a73a-4754-a68c-393c95b9eb63.png?v=1776702262","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f10600-semi-f106-test-method-for-determination-of-leak-integrity-of-gas-delivery-systems-by-helium-leak-detector","provider":"SEMI Dev 2","version":"1.0","type":"link"}