{"product_id":"f10400-semi-f104-particle-test-method-guide-for-evaluation-of-components-used-in-ultrapure-water-and-liquid-chemical-distribution-systems","title":"F10400 - SEMI F104 - Test Method for Evaluation of Particle Contribution of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems","description":"\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003eThis Document provides specifications and test\nmethods to evaluate and compare components for particle contribution into an\nultrapure water (UPW) fluid stream. Two methods for evaluating particle contribution\nare provided.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH3\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH3\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003eThe rinse test method evaluates performance in a\nflushing mode while the component is in a static state (no actively moving\ncomponents within the component under test). It provides an indication of the\nflush volume required to bring particle levels to specification.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH3\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH3\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003eThe dynamic test method evaluates performance during\ncomponent operation and provides an indication of the steady state particle\ncontribution due to dynamic operating conditions.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH1\"\u003e\u003cbr\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003eThese test methods apply to liquid chemical and UPW\nsystem components intended for use in semiconductor manufacturing tools and\nancillary equipment.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003eThis Document describes methods for measuring\nparticle contribution from components while using UPW as the test media. UPW,\nfor the intents and purposes of this Document, is defined as having the minimum\nrequirements as outlined in ¶ 7.4 of this Document.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003eThese methods use an in situ liquid optical particle\nmeasurement (OPM) instrument to quantify performance.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-bidi-font-weight:\nbold'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e (purchase separately)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI E49 — Guide for High Purity and Ultrahigh Purity\nPiping Performance, Subassemblies, and Final Assemblies\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI F57 — Specification for Polymer Components Used in\nUltrapure Water and Liquid Chemical Distribution Systems\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e \u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eRevision History\u003c\/b\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI F104-0520 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI F104-0312 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\n\n\n\n\n\n\n\n\n\n\n\n\n\n\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI F104-1107 (first published)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI F104-0520 - Current","offer_id":40234260365379,"sku":"13851","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F104-0312 - Superseded","offer_id":40234260398147,"sku":"4034","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F104-1107 - Superseded","offer_id":40234260430915,"sku":"10747","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_14839ab1-adaa-4f45-9269-270c58243b94.png?v=1776702762","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f10400-semi-f104-particle-test-method-guide-for-evaluation-of-components-used-in-ultrapure-water-and-liquid-chemical-distribution-systems","provider":"SEMI Dev 2","version":"1.0","type":"link"}