{"product_id":"f10000-semi-f100-compliance-test-method-for-minimum-flow-coefficient-of-diaphragm-valve-for-metric-pfa-tube","title":"F10000 - SEMI F100 - Compliance Test Method for Minimum Flow Coefficient of Diaphragm Valve for Metric PFA Tube","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis test method was technically approved by the Global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on March 11, 2005. It was available at www.semi.org in June 2005.\u003c\/p\u003e\u003cfont size=\"2\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Arial\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis compliance test method presents that the verification of the compatibility of each diaphragm valves for metric perfluroalkoxy (PFA) tube simply.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis document specifies the relative orifice that gives the minimum flow coefficient for diaphragm valve for metric PFA tube.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis compliance test method describes how to verify the flow coefficient of the diaphragm valve by comparing with the relative orifice.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Specification addresses a capacity of diaphragm valves used with metric PFA tubes.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThese diaphragm valves are used in chemical distribution systems for semiconductor and flat panel display manufacturing.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe valves are made from materials such as polytetrafluoroethylene (PTFE) or PFA, which have high corrosion resistance and low contamination contribution to the fluid.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe valves withstand up to 0.2 megapascals (MPa) [29 pounds per square inch (psi)] backpressure.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eFully open to fully shut switch over is the objective of the shut-off valve.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI F100-0705 - Inactive","offer_id":40234350018627,"sku":"11029","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_cee7ce96-d0aa-4395-8563-a70c742c36ab.png?v=1776702267","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f10000-semi-f100-compliance-test-method-for-minimum-flow-coefficient-of-diaphragm-valve-for-metric-pfa-tube","provider":"SEMI Dev 2","version":"1.0","type":"link"}