{"product_id":"f09900-semi-f99-dimensional-specification-of-a-diaphragm-valve-for-a-metric-pfa-tube","title":"F09900 - SEMI F99 - Dimensional Specification of a Diaphragm Valve for a Metric PFA Tube","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis specification was technically approved by the Global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on March 11, 2005. It was available at www.semi.org in June 2005.\u003c\/p\u003e\u003cfont size=\"2\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Arial\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis document specifies the outside dimensions of diaphragm valves used with metric tetrafluoroethylene perfluoroalkylvinylether (PFA) tubes in liquid chemical distribution facilities and process equipment for semiconductor and flat panel display manufacturing.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis specification addresses dimensions of diaphragm valves used with metric PFA tubes except for face-to-face dimensions. Since there are many seizes of fittings being applied to valves, this document doesn’t specify face-to-face dimensions.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThese diaphragm valves are limited to pneumatic valves. Specification for manual valves should be separately provided as needed.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThese diaphragm valves are used in chemical distribution systems for semiconductor and flat panel display manufacturing.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe valves are made from materials such as tetrafluoroethylene (PTFE) or PFA, which have high corrosion resistance and low contamination contribution to the fluid.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe valves withstand up to 0.2 megapascals (MPa) [29 pounds per square inch (psi)] back pressure.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI F65 — Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI F99-0705 - Inactive","offer_id":40234341630019,"sku":"11028","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_e26f61ea-e401-44db-9707-c90f723f259c.png?v=1776702211","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f09900-semi-f99-dimensional-specification-of-a-diaphragm-valve-for-a-metric-pfa-tube","provider":"SEMI Dev 2","version":"1.0","type":"link"}