{"product_id":"f09800-semi-f98-guide-for-treatment-of-reuse-water-in-semiconductor-processing","title":"F09800 - SEMI F98 - Guide for Treatment of Reuse Water in Semiconductor Processing","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version.\u003c\/strong\u003e\u003c\/p\u003e\u003cp\u003e\u003cbr\u003e1  Purpose\u003cbr\u003e1.1  This Guide provides definitions and recommendations for design of industrial water treatment systems that reuse water in a semiconductor manufacturing facility. It is intended to establish a common basis for developing design specifications and decisions concerning planning and design of water reuse systems. This Guide also includes some considerations for the water reuse systems operation.\u003cbr\u003e1.2  This Guide may be used by semiconductor factory engineers and suppliers for developing site-specific basis of design and performance criteria.\u003cbr\u003e2  Scope\u003cbr\u003e2.1  This Guide applies to water treatment systems designed for water reuse within semiconductor manufacturing facilities, with the purpose of supplying water for use in a variety of applications throughout the site. Such applications include directing reuse water to the front end of the ultrapure water (UPW) front end system, cooling systems, exhaust scrubbers, point of use (POU) abatement, thermal processes, and site irrigation. Choice of the reuse scheme depends on the reuse water quality, application requirements, and environmental regulations.\u003cbr\u003e2.2  This Guide can be used to understand the design elements and functionality of water treatment systems that support reuse of water. Although existing factories can be retrofitted to implement water reuse, there is a broader range of opportunities available in new facilities that incorporate water saving applications in the basis of design.\u003cbr\u003e2.3  The scope of this Guide is to provide recommendations regarding water reuse segregation strategy and possible treatment options.\u003cbr\u003e2.4  This Guide reviews conditions and limitations for specific water reuse applications, as well as economic and environmental considerations. It also provides reference for typical wastewater composition.\u003cbr\u003eNOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards (purchase separately)\u003c\/strong\u003e\u003cbr\u003eSEMI S23 — Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment\u003cbr\u003eNOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.\u003cbr\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI F98-0326 (technical revision)\u003cbr\u003eSEMI F98-0923 (technical revision)\u003cbr\u003eSEMI F98-0521 (technical revision)\u003cbr\u003eSEMI F98-0618 (complete rewrite)\u003cbr\u003eSEMI F98-0305 (Reapproved 1111)\u003cbr\u003eSEMI F98-0305 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI F98-0326 - Current","offer_id":43106895659075,"sku":"19063","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F98-0326 - Current + Redline","offer_id":43106895691843,"sku":"19064","price":38900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F98-0923 - Superseded","offer_id":43106895724611,"sku":"17162","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F98-0521 - Superseded","offer_id":43106895757379,"sku":"14533","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F98-0618 - Superseded","offer_id":40234298540099,"sku":"4093","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F98-0305 (Reapproved 1111) - Superseded","offer_id":40234298736707,"sku":"10879","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F98-0305 - Superseded","offer_id":40234298900547,"sku":"10847","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_bf6f97ad-76a1-451a-b2fb-63a2778aecfd.png?v=1776702710","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f09800-semi-f98-guide-for-treatment-of-reuse-water-in-semiconductor-processing","provider":"SEMI Dev 2","version":"1.0","type":"link"}