{"product_id":"f09700-semi-f97-specification-for-facility-package-integration-monitoring-and-control","title":"F09700 - SEMI F97 - Specification for Facility Package Integration, Monitoring and Control","description":"\u003cp class=\"StdsText\"\u003e\u003cfont face=\"times new roman\"\u003eNOTICE: This\nStandard or Safety Guideline has an Inactive Status because the conditions to\nmaintain Current Status have not been met. Inactive Standards or Safety\nGuidelines are available from SEMI and continue to be valid for use.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cfont face=\"times new roman\"\u003e \u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cfont face=\"times new roman\"\u003eThe purpose of\nthis Specification is to provide the requirements for the architecture,\nfunctionality and interfaces for facility monitoring and control systems (FMCS)\nand the various facility package units (FPU) to enable a standardized and\nintegrated communication between them. This Specification is appended with\nrelated information to provide application examples.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cfont face=\"times new roman\"\u003e \u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003ci\u003e\u003cfont face=\"times new roman\"\u003eBackground and Motivation\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/i\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cfont face=\"times new roman\"\u003eToday, the\nsuppliers of FPU (e.g., chemicals, power supply, gases, HVAC) are often using\nindividual communication concepts. This leads to high efforts to specify the\ncommunication structures between FPU and the FMCS, to evaluate the quoted\nsolutions and to eventually integrate these units. These individual, not\nstandardized concepts today are not reusable, bear risks in execution and lead\nto high maintenance costs.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cfont face=\"times new roman\"\u003e \u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan lang=\"EN-GB\" style=\"\"\u003e\u003cfont face=\"times new roman\"\u003eThis Specification is a first step to standardize the\ncommunication between facility and monitoring components. Therefore, it focuses\nin its scope to a small set of requirements which are common to all FPUs. As\nthis communication concept is adopted by the various FPU suppliers and their\ncustomers, more specific standards describing particular FPUs and their\nservices may evolve.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan lang=\"EN-GB\" style=\"\"\u003e\u003cfont face=\"times new roman\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cfont face=\"times new roman\"\u003eWho and what is\naddressed by this Standard.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cfont face=\"times new roman\"\u003eA\nstandardization of the communication concept between FMCS and FPUs will support\nFPU manufacturers, general contractors, system integrators, purchasers, and\ncontrol system manufacturers. It will lead to substantially reduced costs, more\nreliable execution times, and optimized maintenance concepts.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cfont face=\"times new roman\"\u003e \u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cfont face=\"times new roman\"\u003eThis\nStandard specifies the requirements for the architecture, common services,\ndata, and its semantic meaning to integrate the FPUs into the FMCS. For this\npurpose, a basic set of common services (operations) between the FMCS and the\nFPUs are specified to exchange FPU status information and data. In addition,\nthe state models for FPUs are described.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"font-size: 10pt; line-height: 107%;\"\u003e\u003cfont face=\"times new roman\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cspan lang=\"EN-GB\"\u003e\u003cfont face=\"times new roman\"\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003c\/font\u003e\u003cp\u003e\u003cfont face=\"times new roman\"\u003eSEMI E6 — Guide for Semiconductor Equipment Installation Documentation \u003cbr\u003e SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)\u003cbr\u003e SEMI E54 — Specification for Sensor\/Actuator Network \u003c\/font\u003e\u003cbr\u003e\u003c\/p\u003e\u003c\/span\u003e","brand":"semi.org","offers":[{"title":"SEMI F97-0305 - Inactive","offer_id":40234259808323,"sku":"4026","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_f2cf268f-fb48-4028-ad7e-580ab0e7b041.png?v=1776702768","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f09700-semi-f97-specification-for-facility-package-integration-monitoring-and-control","provider":"SEMI Dev 2","version":"1.0","type":"link"}