{"product_id":"f09600-semi-f96-specification-for-port-configuration-of-canisters-to-contain-cvd-precursors","title":"F09600 - SEMI F96 - Specification for Port Configuration of Canisters to Contain CVD Precursors","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis specification was technically approved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on April 22, 2004. Initially available at www.semi.org June 2004; to be published July 2004.\u003c\/p\u003e\u003cfont size=\"2\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Arial\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis document specifies the type, size and spacing of connectors to be used on metal (e.g., stainless steel) canisters for liquid chemical precursors, solutions and solvents.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis document applies to metal (e.g., stainless steel) canisters to be used for \"liquid precursors\" (see definition) including solutions of precursors in solvents. It also applies to containers for solvents used for in situ cleaning of delivery system.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe liquid connection ports (inlet and outlet) are included, as are pneumatic connections to valves.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eParameters such as overall canister dimensions are expected to be specified by other standards.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI F66 — Specification for Port Marking and Symbol of Stainless Steel Vessels for Liquid Chemicals\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI F96-0704 - Inactive","offer_id":40234347561027,"sku":"11026","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_d7cf093f-66d3-44b2-8e6b-9101f75ed19b.png?v=1776702212","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f09600-semi-f96-specification-for-port-configuration-of-canisters-to-contain-cvd-precursors","provider":"SEMI Dev 2","version":"1.0","type":"link"}