{"product_id":"f08000-semi-f80-test-method-for-determination-of-gas-change-purge-efficiency-of-gas-delivery-system","title":"F08000 - SEMI F80 - Test Method for Determination of Gas Change\/Purge Efficiency of Gas Delivery System","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Document is a guide to a test method to determine gas change\/purge efficiency of gas delivery system.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eIt covers both conventional metal face sealing and surface mount gas delivery systems.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Test Method applies to all type of high purity gas delivery systems used in semiconductor manufacturing facilities and comparable research and development areas.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e\u003cfont face=\"arial\" size=\"2\"\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003c\/font\u003e\u003cp\u003e\u003cfont\u003e\u003cfont face=\"arial\" size=\"2\"\u003eNone.\u003c\/font\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI F80-0309 (Reapproved 0914) - Inactive","offer_id":43106896511043,"sku":"4059","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F80-0309 - Superseded","offer_id":40234258628675,"sku":"10853","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F80-1103 - Superseded","offer_id":40234258694211,"sku":"10831","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_893786cb-8ead-4d35-97df-60350c529df6.png?v=1776702742","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f08000-semi-f80-test-method-for-determination-of-gas-change-purge-efficiency-of-gas-delivery-system","provider":"SEMI Dev 2","version":"1.0","type":"link"}