{"product_id":"f07600-semi-f76-test-method-for-evaluation-of-particle-contribution-from-gas-system-components-exposed-to-corrosive-gas","title":"F07600 - SEMI F76 - Test Method for Evaluation of Particle Contribution from Gas System Components Exposed to Corrosive Gas","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 2018. Available at www.semiviews.org and www.semi.org in March 2018; originally published March 2003; previously published November 2010.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNOTICE: This Document was reapproved with minor editorial changes.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis is a test method to compare gas handling components for potential particle generation in corrosive gas service. It is intended as a practical means of generating performance data for a group of components to be compared in a selection process.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Test Method applies to valves, particle filters, and low pressure regulators.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI C59 — Specification for Nitrogen\u003cbr\u003e SEMI E66 — Test Method for Determining Particle Contribution by Mass Flow Controllers\u003cbr\u003e SEMI F43 — Test Method for Determination of Particle Contribution by Point-of-use Gas Purifiers and Gas Filters\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI F76-0303 (Reapproved 0318) - Current","offer_id":40234292969539,"sku":"4087","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F76-0303 (Reapproved 1110) - Superseded","offer_id":40234293067843,"sku":"10863","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F76-0303 - Superseded","offer_id":40234293166147,"sku":"10826","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_441307e3-a789-4316-9f8a-1d9750cadaf2.png?v=1776702715","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f07600-semi-f76-test-method-for-evaluation-of-particle-contribution-from-gas-system-components-exposed-to-corrosive-gas","provider":"SEMI Dev 2","version":"1.0","type":"link"}