{"product_id":"f07100-semi-f71-test-method-for-temperature-cycle-of-gas-delivery-system","title":"F07100 - SEMI F71 - Test Method for Temperature Cycle of Gas Delivery System","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis guideline was technically approved by the Global Facilities Committee and is the direct responsibility of the Japan Facilities Committee. Current edition approved by the Japan Regional Standards Committee on July 19, 2002. Initially available at www.semi.org September 2002; to be published November 2002.\u003c\/p\u003e\u003cfont size=\"2\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Arial\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this document is to provide a standardized methodology and procedure for the leakage performance of gas delivery systems temperature cycling.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis test method applies to gas delivery systems installed in semiconductor manufacturing equipment.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eSEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping System and Components\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI F71-1102 - Inactive","offer_id":40234338025539,"sku":"11040","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_6c48d487-24d3-46c9-b3fb-f222088d11fb.png?v=1776702235","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f07100-semi-f71-test-method-for-temperature-cycle-of-gas-delivery-system","provider":"SEMI Dev 2","version":"1.0","type":"link"}