{"product_id":"f07000-semi-f70-test-method-for-determination-of-particle-contribution-of-gas-delivery-system","title":"F07000 - SEMI F70 - Test Method for Determination of Particle Contribution of Gas Delivery System","description":"\u003cp class=\"StdsText0\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-bidi-font-weight:\nbold'\u003e\u003cfont size=\"2\"\u003eNOTICE: The designation of SEMI F70 was updated during the 0320\npublishing cycle to reflect the creation of SEMI F70.1.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003eThe purpose of this Document is to provide a\nstandardized methodology and procedure for measuring the particle contribution\nperformance of a gas delivery system in terms of number of particles added to\ngas flowing through the system. This standardized procedure is intended to be\nused commonly by the gas delivery system suppliers, equipment suppliers, and\nend-users.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003eThis Test Method applies to surface mount and\nconventional gas delivery systems used in semiconductor manufacturing equipment.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003e\u003cb\u003eSubordinate Standards:\u003c\/b\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;\nmso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003eSEMI F70.1-0320 \u003c\/font\u003e\u003c\/span\u003e\u003cspan style=\"font-size: 10pt;\"\u003e— \u003cfont face=\"arial\"\u003eTest Method for\nDetermination of Particle Contribution of Gas Delivery System and Its\nComponents Through Pulsed Testing\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsDesignationTitle\"\u003e\u003cspan style=\"font-size: 10pt;\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\n\n\n\n\n\n\n\n\n\n\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-bidi-font-weight:\nbold'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cb\u003e\u003cfont face=\"arial\" size=\"2\"\u003eReferenced SEMI Standards\u003c\/font\u003e\u003c\/b\u003e\u003c\/p\u003e\u003cp\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-bidi-font-weight:\nbold'\u003e\u003cfont size=\"2\"\u003eSEMI C57 — Specification for Argon\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"StdsText\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-bidi-font-weight:\nbold'\u003e\u003cfont size=\"2\"\u003eSEMI C59 — Specification for Nitrogen\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003co:p\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cbr\u003e","brand":"semi.org","offers":[{"title":"SEMI F70-0320 - Current","offer_id":40234294509635,"sku":"13773","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F70-0611 (Reapproved 0517) - Superseded","offer_id":40234294542403,"sku":"4076","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F70-0611 - Superseded","offer_id":40234294575171,"sku":"10868","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F70-0302 - Superseded","offer_id":40234294607939,"sku":"10821","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_d3c6235e-ed8c-458f-81e3-ce1a4059975e.png?v=1776702724","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f07000-semi-f70-test-method-for-determination-of-particle-contribution-of-gas-delivery-system","provider":"SEMI Dev 2","version":"1.0","type":"link"}