{"product_id":"f06800-semi-f68-test-method-for-determining-purifier-efficiency","title":"F06800 - SEMI F68 - Test Method for Determining Purifier Efficiency","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4, 2013. Available at www.semiviews.org and www.semi.org in July 2013; originally published November 2001; previously published November 2008.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this document is to define a test method to quantify the efficiency of a purifier for removal of an active gaseous impurity from a matrix gas.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eTo determine the efficiency of a gas purifier to remove a given impurity species. Efficiency tests are performed by adding ppm levels of gaseous impurities to a pure matrix gas and monitoring the effluent of the test purifier for active impurity species. Tests are done at supplier recommended flow rate, operating temperature and pressure.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eTo establish a method of determining instantaneous purifier efficiency.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe test method applies to point of use (POU) and large scale purifiers.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis method is for UHP efficient removal of low-level contaminants.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI E29 — Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers\u003cbr\u003e SEMI F6 — Guide for Secondary Containment of Hazardous Gas Piping Systems\u003cbr\u003e SEMI F22 — Guide for Gas Distribution Systems\u003cbr\u003e SEMI F33 — Test Method for Calibration of Atmospheric Pressure Ionization Mass Spectrometer (APIMS)\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI F68-1101 (Reapproved 0713) - Current","offer_id":40234249846851,"sku":"4048","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F68-1101 (Reapproved 1108) - Superseded","offer_id":40234249912387,"sku":"10818","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F68-1101 - Superseded","offer_id":40234249977923,"sku":"10817","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_4472c7dd-2c7e-4d44-ad56-31785bfcebda.png?v=1776702751","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f06800-semi-f68-test-method-for-determining-purifier-efficiency","provider":"SEMI Dev 2","version":"1.0","type":"link"}