{"product_id":"f06700-semi-f67-test-method-for-determining-inert-gas-purifier-capacity","title":"F06700 - SEMI F67 - Test Method for Determining Inert Gas Purifier Capacity","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4, 2013. Available at www.semiviews.org and www.semi.org in July 2013; originally published November 2001; previously published November 2008.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Document is to define a test method to quantify impurity removal capacity of inert gas purifiers.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eTo determine the impurity capacity of a gas purifier at the point of breakthrough. Capacity tests are done by adding ppm levels of a given gaseous impurity to a pure zero gas and monitoring the effluent of the test purifier for active impurity species.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Document is intended for point of use (POU) inert gas purifiers where inlet purity is 99.9995% or higher.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI E29 — Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers\u003cbr\u003e SEMI F6 — Guide for Secondary Containment of Hazardous Gas Piping Systems\u003cbr\u003e SEMI F22 — Guide for Gas Distribution Systems\u003cbr\u003e SEMI F33 — Test Method for Calibration of Atmospheric Pressure Ionization Mass Spectrometer (APIMS)\u003cbr\u003e \u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI F67-1101 (Reapproved 0713) - Current","offer_id":40234263838787,"sku":"4047","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F67-1101 (Reapproved 1108) - Superseded","offer_id":40234263871555,"sku":"10816","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F67-1101 - Superseded","offer_id":40234263904323,"sku":"10815","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_6b3cef92-9936-422b-8cb2-c7a24b0439a7.png?v=1776702751","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f06700-semi-f67-test-method-for-determining-inert-gas-purifier-capacity","provider":"SEMI Dev 2","version":"1.0","type":"link"}