{"product_id":"f06500-semi-f65-dimensional-specification-for-mounting-bases-of-diaphragm-valves-used-with-metric-pfa-tubes","title":"F06500 - SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis specification was technically approved by the Global Liquid Chemical Distribution Systems Committee and is the direct responsibility of the Japanese Liquid Chemical Distribution Systems Committee. Current edition approved by the Japanese Regional Standards Committee on August 3, 2001. Initially available at www.semi.org September 2001; to be published November 2001.\u003c\/p\u003e\u003cfont size=\"2\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Arial\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis document specifies dimensions of mounting base and their clearance hole sizes for bolts and the hole locations of diaphragm valves used with metric tetrafluoroethylene perfluoroalkylvinylether copolymer (PFA) tubes in liquid chemical distribution facilities and process equipment for semiconductor and flat panel display manufacturing.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eTo avoid any disturbance of future development and to facilitate interchangeability of diaphragm valves, this document has a limited scope as specified in § 2.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis document applies to mounting bases for two way valves with a diaphragm designed to shut off and\/or regulate a liquid chemical flow in tubes whose sizes are listed in Table 1.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe valves are made from materials such as polytetrafluoroethylene (PTFE) or PFA, which have high corrosion resistance and low contamination contribution to the fluid.\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI F65-1101 - Inactive","offer_id":40234344316995,"sku":"11021","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_093d7bb9-12a0-4f43-a3ec-ff086e6b935e.png?v=1776702239","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f06500-semi-f65-dimensional-specification-for-mounting-bases-of-diaphragm-valves-used-with-metric-pfa-tubes","provider":"SEMI Dev 2","version":"1.0","type":"link"}