{"product_id":"f06200-semi-f62-test-method-for-determining-mass-flow-controller-performance-characteristics-for-ambient-and-gas-temperature-effects","title":"F06200 - SEMI F62 - Test Method for Determining Mass Flow Controller Performance Characteristics for Ambient and Gas Temperature Effects","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Standard defines a method for testing mass flow controllers (MFCs) being considered for installation into a gas distribution system and to quantify ambient and gas temperature effects on the MFC’s indicated and actual flow.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Test Method applies to metal and polymer sealed MFCs. The tests include those listed below and are to be performed in the following order:\u003cbr\u003e1. Ambient Temperature Effects (Steady State and Transient)\u003cbr\u003e2. Gas Temperature Effects (Steady State and Transient)\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eNone.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI F62-1123 (technical revision)\u003cbr\u003eSEMI F62-1016 (technical revision)\u003cbr\u003eSEMI F62-0701 (Reapproved 1111)\u003cbr\u003eSEMI F62-0701 (Reapproved 0307)\u003cbr\u003eSEMI F62-0701 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI F62-1123 - Current","offer_id":43106896052291,"sku":"17229","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F62-1016 - Superseded","offer_id":43106896085059,"sku":"4071","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F62-0701 (Reapproved 1111) - Superseded","offer_id":40234253320259,"sku":"10877","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F62-0701 (Reapproved 0307) - Superseded","offer_id":40234253254723,"sku":"10811","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F62-0701 - Superseded","offer_id":40234253353027,"sku":"10810","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_ee065e52-7df7-4646-bee7-cce50cc244a4.png?v=1776702727","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f06200-semi-f62-test-method-for-determining-mass-flow-controller-performance-characteristics-for-ambient-and-gas-temperature-effects","provider":"SEMI Dev 2","version":"1.0","type":"link"}