{"product_id":"f03800-semi-f38-test-method-for-efficiency-qualification-of-point-of-use-gas-filters","title":"F03800 - SEMI F38 - Test Method for Efficiency Qualification of Point-of-Use Gas Filters","description":"\u003cp class=\"StdsText\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-bidi-font-weight: \n \n bold'\u003e\u003cfont size=\"2\"\u003e\u003cb\u003eNOTICE:\u003c\/b\u003e This Document was completely rewritten in 2019.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif; \n \n mso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif; \n \n mso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003eThe purpose of this Document is to define a \n \n comprehensive standard test sequence to qualify the particle filtration \n \n efficiency achievable using point-of-use (POU) gas filters.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH1\"\u003e\u003cbr\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif; \n \n mso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003eThis Test Method defines an evaluation method for \n \n POU filters of various media (e.g., metallic, ceramic, and polymeric) typically \n \n used for filtering inert and process gases in semiconductor applications. POU \n \n filters are designed to handle relatively low flow rates (0.5 to 50 slm) and \n \n moderately high pressure drops. The filter housing and filtration element are \n \n combined into one sealed and inseparable unit.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-bidi-font-weight:bold'\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cfont size=\"2\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-bidi-font-weight:bold'\u003eThis Test \n \n Method is intended to demonstrate the ability of a POU gas filter to equal or \n \n exceed a specific particle filtration efficiency class when challenged with a \n \n monodispersed aerosol in the size range described in § \u003c\/span\u003e\u003c!--[if supportFields]\u003e\u003cspan style=\"mso-bookmark:_Ref44410634\"\u003e\u003c\/span\u003e\u003cspan style=\"mso-element:field-begin\"\u003e\u003c\/span\u003e\u003cspan style=\"mso-bookmark:_Ref44410634\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif; \n \n mso-bidi-font-weight:bold'\u003e REF\u003cspan style=\"mso-spacerun:yes\"\u003e \n \n \u003c\/span\u003e_Ref44403816 \\h \\r \\t\u003cspan style=\"mso-spacerun:yes\"\u003e \u003c\/span\u003e\\* \n \n MERGEFORMAT \u003cspan style=\"mso-element:field-separator\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c![endif]--\u003e\u003cspan style='font-family:\"Arial\",sans-serif; \n \n mso-bidi-font-weight:bold'\u003e7.6\u003c!--[if gte mso 9]\u003e\u003cxml\u003e \n \n  \u003cw:data\u003e08D0C9EA79F9BACE118C8200AA004BA90B02000000080000000D0000005F00520065006600340034003400300033003800310036000000\u003c\/w:data\u003e \n \n \u003c\/xml\u003e\u003c![endif]--\u003e\u003c\/span\u003e\u003c!--[if supportFields]\u003e\u003cspan style=\"mso-bookmark: \n \n _Ref44410634\"\u003e\u003c\/span\u003e\u003cspan style=\"mso-element:field-end\"\u003e\u003c\/span\u003e\u003c![endif]--\u003e\u003cspan style='font-family:\"Arial\",sans-serif; \n \n mso-bidi-font-weight:bold'\u003e.\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif; \n \n mso-bidi-font-weight:bold'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e \n \n  \n \n  \n \n  \n \n  \n \n  \n \n  \n \n  \n \n  \n \n  \n \n  \n \n  \n \n  \n \n  \n \n \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 107%; font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cfont face=\"arial\" size=\"2\"\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003c\/font\u003e\u003cp\u003e\u003cfont\u003e\u003cfont face=\"arial\" size=\"2\"\u003eNone.\u003c\/font\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI F38-0720 - Current","offer_id":40234270031939,"sku":"14127","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F38-0699 (Reapproved 0611) - Superseded","offer_id":40234270130243,"sku":"4030","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F38-0699 (Reapproved 1104) - Superseded","offer_id":40234270294083,"sku":"10776","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F38-0699 - Superseded","offer_id":40234270359619,"sku":"10952","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_ec844329-bf06-4aaa-b643-4b7d39f0e261.png?v=1776702765","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f03800-semi-f38-test-method-for-efficiency-qualification-of-point-of-use-gas-filters","provider":"SEMI Dev 2","version":"1.0","type":"link"}