{"product_id":"f03000-semi-f30-据付現場における微量ガス不純物およびパーティクルに関する精製器性能テストの始動および検証","title":"F03000 - SEMI F30 - 据付現場における微量ガス不純物およびパーティクルに関する精製器性能テストの始動および検証","description":"\u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e本スタンダードは，\u003cspan style=\"COLOR: black\"\u003eglobal Gases Interfaces \u0026amp; Carriers Committee\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで技術的に承認されている。現版は\u003cspan style=\"COLOR: black\"\u003e2010\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年\u003cspan style=\"COLOR: black\"\u003e4\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月\u003cspan style=\"COLOR: black\"\u003e30\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e日，\u003cspan style=\"COLOR: black\"\u003eglobal Audits and Reviews Subcommittee\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eにて発行が承認された。\u003cspan style=\"COLOR: black\"\u003e2010\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年\u003cspan style=\"COLOR: black\"\u003e6\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月に\u003cspan style=\"COLOR: black\"\u003ewww.semi.org\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで入手可能となる。\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e初版は1998\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年発行。\u003c?xml:namespace prefix = o ns = \"urn:schemas-microsoft-com:office:office\" \/\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp class=\"MsoNormal\" style=\"MARGIN: 0in 0in 0pt\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \u003ch2 style=\"MARGIN: 3pt 0in; TEXT-INDENT: 0in\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e本手順の目的は精製器の性能を検証することであるが，それには分析機器を使用しガス不純物およびパーティクルを顧客仕様書に合わせて測定して検証する。特定の入口および／または入口の測定が要求される場合，顧客と事前に打ち合わせを行うべきである。入口不純物は\u003cspan style=\"mso-fareast-language: JA\"\u003e100\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e万分の\u003cspan style=\"mso-fareast-language: JA\"\u003e1\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e単位（\u003cspan style=\"mso-fareast-language: JA\"\u003eppm\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e）または\u003cspan style=\"mso-fareast-language: JA\"\u003e10\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e億分の\u003cspan style=\"mso-fareast-language: JA\"\u003e1\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e単位（\u003cspan style=\"mso-fareast-language: JA\"\u003eppb\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e）の分析ができる機器で測定されなければならない。この手順は，毎分\u003cspan style=\"mso-fareast-language: JA\"\u003e50\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eリットル（\u003cspan style=\"mso-fareast-language: JA\"\u003eLPM\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e）を超える大規模な流量のバルク精製器に対してだけ適用される。\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/h2\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI F58 — Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Atmospheric Pressure Ionization Mass Spectroscopy (APIMS) \u003cbr\u003e SEMI F68 — Test Method for Determining Purifier Efficiency\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI F30-0710 - Superseded","offer_id":40234360766531,"sku":"10866","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_b7a3534b-82b3-4541-8f4c-d0cfc45003ed.png?v=1776702015","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f03000-semi-f30-%e6%8d%ae%e4%bb%98%e7%8f%be%e5%a0%b4%e3%81%ab%e3%81%8a%e3%81%91%e3%82%8b%e5%be%ae%e9%87%8f%e3%82%ac%e3%82%b9%e4%b8%8d%e7%b4%94%e7%89%a9%e3%81%8a%e3%82%88%e3%81%b3%e3%83%91%e3%83%bc%e3%83%86%e3%82%a3%e3%82%af%e3%83%ab%e3%81%ab%e9%96%a2%e3%81%99%e3%82%8b%e7%b2%be%e8%a3%bd%e5%99%a8%e6%80%a7%e8%83%bd%e3%83%86%e3%82%b9%e3%83%88%e3%81%ae%e5%a7%8b%e5%8b%95%e3%81%8a%e3%82%88%e3%81%b3%e6%a4%9c%e8%a8%bc","provider":"SEMI Dev 2","version":"1.0","type":"link"}