{"product_id":"f02900-semi-f29-test-method-for-purge-efficacy-of-gas-source-system-panels","title":"F02900 - SEMI F29 - Test Method for Purge Efficacy of Gas Source System Panels","description":"\u003cp\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e\u003cstrong\u003eNOTICE: \u003c\/strong\u003eThis Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThis Standard defines the purge efficacy test method recommended for determining the minimum acceptable level of purge efficacy for gas source systems used in semiconductor manufacturing. It is also intended as an aid to the procurement of gas source equipment.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThis Test Method applies to gas source equipment used in semiconductor manufacturing facilities and comparable research and development areas. It includes contamination testing requirements for gas source systems.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThe tests covered by this Standard are as follows:\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cul\u003e\n\u003cli class=\"MsoNormal\"\u003e\n\u003cspan style='font-family:\"Arial\",sans-serif;'\u003ePurge efficacy with a non-interactive gas using manufacturers’ standard purge sequence.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\n\u003c\/li\u003e\n\u003cli class=\"MsoNormal\"\u003e\n\u003cspan style='font-family:\"Arial\",sans-serif;'\u003ePurge efficacy with a non-interactive gas using the test method specified purge sequence.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\n\u003c\/li\u003e\n\u003cli class=\"MsoNormal\"\u003e\n\u003cspan style='font-family:\"Arial\",sans-serif;'\u003ePurge efficacy with an interactive gas using manufacturers’ standard purge sequence.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\n\u003c\/li\u003e\n\u003cli class=\"MsoNormal\"\u003e\n\u003cspan style='font-family:\"Arial\",sans-serif;'\u003ePurge efficacy with an interactive gas using the test method specified purge sequence.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\u003cp class=\"MsoNormal\"\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eNone.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI F29-0997 (Reapproved 0517)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI F29-0997 (Reapproved 0611)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI F29-0997 (Reapproved 1103)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI F29-0997 (first published)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI F29-0997 (Reapproved 0517) - Inactive","offer_id":43106895986755,"sku":"4074","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F29-0997 (Reapproved 0611) - Superseded","offer_id":40234252075075,"sku":"10871","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F29-0997 (Reapproved 1103) - Superseded","offer_id":40234251944003,"sku":"10767","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_9a6abbd7-a4c2-46ec-accf-c4c5825c0bd9.png?v=1776702725","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f02900-semi-f29-test-method-for-purge-efficacy-of-gas-source-system-panels","provider":"SEMI Dev 2","version":"1.0","type":"link"}