{"product_id":"f01400-semi-f14-guide-for-the-design-of-gas-source-equipment-enclosures","title":"F01400 - SEMI F14 - Guide for the Design of Gas Source Equipment Enclosures","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis standard was technically reapproved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on December 18, 1998. Initially available on www.semi.org February 1999; to be published June 1999. Originally published in 1993.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eEditorial changes were made to §§ 3.1.1, 6.2.1, and 6.2.2.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis document summarizes gas source equipment enclosure design considerations. It is intended for use by manufacturers and purchasers.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eDesign considerations pertaining to gas source equipment enclosures are described herein. Modifications required to accommodate specific gases, cylinders, or unusual applications (e.g., process equipment) are not addressed.\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI S4 — Safety Guideline for the Segregation\/Separation of Gas Cylinders Contained in Cabinets\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI F14-93 (Reapproved 0699) - Inactive","offer_id":40234338615363,"sku":"10968","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_1abf5076-0f32-4871-b354-ce67e32b7ae5.png?v=1776702253","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f01400-semi-f14-guide-for-the-design-of-gas-source-equipment-enclosures","provider":"SEMI Dev 2","version":"1.0","type":"link"}