{"product_id":"f01300-semi-f13-guide-for-gas-source-control-equipment","title":"F01300 - SEMI F13 - Guide for Gas Source Control Equipment","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis guide was technically approved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on August 27, 2001. Initially available at www.semi.org September 2001; to be published November 2001. Originally published in 1993.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this document is to provide a guide for the design and operational requirements of gas source control equipment which is used to control pressure and flow from a gas cylinder to the point of use.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis document describes the components and minimum performance criteria for gas source control equipment used with hazardous production material (HPM) semiconductor gases. This guide also includes recommended component functions and operating requirements.\u003c\/p\u003e\u003cfont color=\"#333333\" size=\"2\" face=\"Arial\"\u003e\u003cfont color=\"#333333\" size=\"2\" face=\"Arial\"\u003e\u003cfont color=\"#333333\" size=\"2\" face=\"Arial\"\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components\u003cbr\u003e SEMI F2 — Specification for 316L Stainless Steel Tubing for General Purpose Semiconductor Manufacturing Applications\u003cbr\u003e SEMI F3 — Guide for Welding Stainless Steel Tubing for Semiconductor Manufacturing Applications\u003cbr\u003e SEMI F4 — Guide for Remotely Actuated Cylinder Valves\u003cbr\u003e SEMI F6 — Guide for Secondary Containment of Hazardous Gas Piping Systems\u003cbr\u003e SEMI F14 — Guide for the Design of Gas Source Equipment Enclosures\u003cbr\u003e SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment\u003cbr\u003e SEMI S4 — Safety Guideline for the Segregation\/ Separation of Gas Cylinders Contained in Cabinets\u003cbr\u003e SEMI S5 — Safety Guideline for Flow Limiting Devices\u003cbr\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI F13-1101 - Inactive","offer_id":40234346184771,"sku":"11036","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F13-93 - Superseded","offer_id":40234346020931,"sku":"10959","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_c2167a8b-c53e-46d0-98eb-1fb0d49ff2a6.png?v=1776702253","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f01300-semi-f13-guide-for-gas-source-control-equipment","provider":"SEMI Dev 2","version":"1.0","type":"link"}