{"product_id":"f00500-semi-f5-guide-for-gaseous-effluent-handling","title":"F00500 - SEMI F5 - Guide for Gaseous Effluent Handling","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cspan style=\"font-size: small;\"\u003e\u003cfont face=\"arial\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cfont size=\"2\"\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"arial\"\u003e \u003c\/font\u003e\u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\"\u003e \u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\"\u003eNOTICE: This document, as balloted, is intended to replace SEMI F5-90 in its entirety.\u003c\/font\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\"\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\"\u003eNOTICE: Paragraphs entitled \"NOTE\" are not an official part of this guide and are not intended to modify or supersede the official guide. These have been supplied by the Task Force to enhance usage of the guide.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\"\u003eThe purpose of this guide is to provide the semiconductor industry with the general knowledge and background information for understanding the principles of exhaust systems.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\"\u003eIt includes suggestions for layout and selection as well as application of appropriate methods and equipment for abating emissions.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\"\u003eThis guide is intended for use in abatement selection for both gaseous and particulate contaminant materials potentially emitted from semiconductor manufacturing facilities.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003ci\u003e\u003cfont face=\"arial\"\u003e　\u003c\/font\u003e\u003c\/i\u003e\u003c\/p\u003e\n\u003ci style=\"\"\u003e\u003cfont face=\"arial\"\u003e \u003c\/font\u003e\u003c\/i\u003e\u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\"\u003e\u003ci\u003eApplicability\u003c\/i\u003e — This guide presents a review and evaluation of available information including:\u003c\/font\u003e\u003c\/p\u003e \u003cul style=\"\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003e\u003cfont face=\"arial\"\u003eChemical and physical properties of chemical compounds and elements, that are, or may be, released from semiconductor manufacturing operations,\u003c\/font\u003e\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003e\u003cfont face=\"arial\"\u003eSome current industry practices for separating exhaust systems for different groups of materials,\u003c\/font\u003e\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003e\u003cfont face=\"arial\"\u003ePotential methods for abating emissions of gaseous and particulate contaminants exhausted from semiconductor manufacturing operations at \"End-of-Pipe\",\u003c\/font\u003e\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003e\u003cfont face=\"arial\"\u003ePotential methods for abating emissions of gaseous and particulate contaminants exhausted from semiconductor manufacturing processes at \"Point-of-Use\" and reasons why they should be used for some processes,\u003c\/font\u003e\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003e\u003cfont face=\"arial\"\u003eStandard industry methods of recovery, replacement, and \"usage reduction\" for minimizing release of materials.\u003c\/font\u003e\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e\n\u003c\/ul\u003e \u003cp dir=\"ltr\" align=\"left\" style=\"\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\"\u003e　\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont face=\"arial\"\u003e\u003cb style=\"\"\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003c\/font\u003e\u003cp style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont face=\"arial\"\u003eSEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment \u003cbr\u003e \u003c\/font\u003e\u003cfont style=\"\"\u003e\u003cfont face=\"arial\"\u003eSEMI S5 — Safety Guideline for Flow Limiting Devices \u003cbr\u003e \u003c\/font\u003e\u003cfont style=\"\"\u003e\u003cfont face=\"arial\"\u003eSEMI S8 — Safety Guidelines Equipment for Ergonomics Engineering of Semiconductor Manufacturing Equipment \u003c\/font\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI F5-1101 - Inactive","offer_id":40234348838979,"sku":"6232","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI F5-90 - Superseded","offer_id":40234348904515,"sku":"10945","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/FVolume_5dd84fc0-cb28-4dd5-926b-05a54035539e.png?v=1776702243","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/f00500-semi-f5-guide-for-gaseous-effluent-handling","provider":"SEMI Dev 2","version":"1.0","type":"link"}