{"product_id":"e18000-semi-e180-通过icp-ms测量半导体晶圆加工过程中关键腔室部件表面金属污染的试验方法","title":"E18000 - SEMI E180 - 通过ICP-MS测量半导体晶圆加工过程中关键腔室部件表面金属污染的试验方法","description":"\u003cbr\u003e\u003cbr\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eNOTICE: This translation is a REFERENCE COPY ONLY. If differences\nshould exist between the English version and a translation in any other\nlanguage, the English version is the official and authoritative version.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/b\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cb\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e注意：\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e这\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e个翻\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e译\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e是一个参考版本。如果您在使用上，\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e发现\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e中文翻\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e译\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e版本与英文原文版本\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e产\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e生任何差异或是不确定之\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e处\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e，\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e请务\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e必参考英文原文版本，并以英文原文版本\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e为\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e主，英文原文版本属于正式和权威的版本。\u003c\/span\u003e\u003c\/b\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e本文档介\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e绍\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e了一种使用\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:\n10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:\nArial;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e电\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e感耦合等离子体\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e-\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:\n107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e质谱\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e法\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eICP-MS\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e）\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e对\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e关\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e键\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e腔室部件\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eCCCs\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e）的表面微量金属\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e浓\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e度\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e进\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e行定量分析的方法。本\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e标\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e准旨在促\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e进\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e用\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e户\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e和工\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e艺设备\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:\n10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:\nArial;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e供\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e应\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e商的沟通。它\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:\n10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:\nArial;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e还\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e可用于促\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e进\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e工\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e艺设备\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e供\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e应\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e商和关\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e键\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e腔室部件\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eCCC\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e）制造商之\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:\n10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:\nArial;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e间\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e关于表面金属\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e污\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e染\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e预\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e期及其\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:\n10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:\nArial;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e测试\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e方法的更好沟通。\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;\nfont-family:\"Arial\",sans-serif'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e本文件描述了微量金属\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e测\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e量的流程，包括关\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e键\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e腔室部件\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:\n10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:\nArial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:Arial;\nmso-bidi-font-family:Arial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:\n107%;font-family:\"Arial\",sans-serif'\u003eCCC\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:\n10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:\nArial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:Arial;\nmso-bidi-font-family:Arial'\u003e）表面微量金属的采集，因\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:\n10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:\nArial;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e为\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e它影响\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e测\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e量数据的可靠性和每个\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e测试设备\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e的可重复性。\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e使用本文件是\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e为\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e了确保各工\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:\n10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:\nArial;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e艺设备\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e供\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e应\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e商或关\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e键\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e腔室部件\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:\n10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:\nArial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:Arial;\nmso-bidi-font-family:Arial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:\n107%;font-family:\"Arial\",sans-serif'\u003eCCC\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:\n10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:\nArial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:Arial;\nmso-bidi-font-family:Arial'\u003e）制造商提供的\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e结\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e果\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e报\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e告一致性。\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e本文件适用于\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e电\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e感耦合等离子体\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003e-\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e质谱\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e法\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;\nmso-fareast-theme-font:minor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eICP-MS\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e）\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e测\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e定关\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e键\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e腔室部件\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eCCCs\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e）（如\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:\n10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:\nArial;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e喷\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e淋\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e头\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;\nmso-fareast-theme-font:minor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e、基座）的表面微量金属\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:\n107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e浓\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e度。\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e本文件适用于未使用的关\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e键\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e腔室部件\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:\n10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:\nArial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:Arial;\nmso-bidi-font-family:Arial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:\n107%;font-family:\"Arial\",sans-serif'\u003eCCC\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:\n10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:\nArial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:Arial;\nmso-bidi-font-family:Arial'\u003e）或其零件。\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e本文件涵盖了局部萃取法和全浸泡法微量金属采集技\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e术\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e。\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e本文档中目\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;\nmso-ascii-font-family:Arial;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003e标\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e金属有\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:\n10.0pt;line-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:\nArial;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e铝\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eAl\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e）、\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e钠\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eNa\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e）、\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e钾\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eK\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e）、\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e钙\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eCa\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e）、\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e锂\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eLi\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e）、\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e铁\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eFe\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e）、\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e铜\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eCu\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e）、\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e镍\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eNi\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e）、\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e铬\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eCr\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e）、\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e钴\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eCo\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e）、\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e钛\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eTi\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e）、\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e镁\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eMg\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e）、\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"PMingLiU\",serif;mso-ascii-font-family:Arial;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e锌\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eZn\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e）。\u003c\/span\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E180-1220 - Current","offer_id":40234395631683,"sku":"14884","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_ae06e881-bb69-46b1-85ee-c697d0e379eb.png?v=1776701645","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e18000-semi-e180-%e9%80%9a%e8%bf%87icp-ms%e6%b5%8b%e9%87%8f%e5%8d%8a%e5%af%bc%e4%bd%93%e6%99%b6%e5%9c%86%e5%8a%a0%e5%b7%a5%e8%bf%87%e7%a8%8b%e4%b8%ad%e5%85%b3%e9%94%ae%e8%85%94%e5%ae%a4%e9%83%a8%e4%bb%b6%e8%a1%a8%e9%9d%a2%e9%87%91%e5%b1%9e%e6%b1%a1%e6%9f%93%e7%9a%84%e8%af%95%e9%aa%8c%e6%96%b9%e6%b3%95","provider":"SEMI Dev 2","version":"1.0","type":"link"}