{"product_id":"e17000-semi-e170-specification-for-secured-foundation-of-recipe-management-system-sforms","title":"E17000 - SEMI E170 - Specification for Secured Foundation Of Recipe Management System (SFORMS)","description":"\u003cp\u003e\u003c\/p\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Standard is to provide a standardized ‘secure, safe and efficient recipe operation mechanism between Recipe Management System (RMS) and equipment’ which is used as a foundation of RMS for semiconductor manufacturing systems or similar ones.\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cbr\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Standard is to provide a standardized ‘secure, safe and efficient recipe operation mechanism between RMS and equipment’ which especially supports RMS with the following concepts:\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• Management of recipes is centralized to RMS (Single Point Of Recipe Management [SPORM] concept)\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• Storage of the master copies of the recipes are centralized to Recipe Server in RMS (Recipe Server Centric concept)\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cbr\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Standard is to support RMS in the following aspects:\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• Extension of recipe identification capability\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• Protection of the recipes in equipment from non-privileged access by defining protected recipe spaces per purposes\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• Reduction of operator efforts required to maintain consistency of recipes in equipment with recipes in Recipe Server by providing an automated consistency maintenance mechanism based on cache\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• Authentication of consistency of recipes in equipment with Recipe Server by providing an optional Pre-Execution Check mechanism\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• Reduction of operator efforts to download recipes that are used for production from Recipe Server to equipment by providing an automatic transfer mechanism based on cache\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• Reduction of communication and computation overhead and cost due to recipe download related transactions by adopting cache operation\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• Addition of remote access capability to access recipes on the host RMS by using recipe applications (such as recipe editor) on equipment or other workstation\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cbr\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Standard is to provide a recipe operation mechanism which supports similar with or a superset of current practices in the following aspects for easier deployment.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• Recipe identification and uniqueness control\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• Recipe linkage\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• Variable Parameter management\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• Consistency check of a recipe with the recipe in Recipe Server just before execution (Pre-Execution Check)\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• Conventional recipe download modes such as Pre-Download Mode or Full Download Mode\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cbr\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard covers a definition and usage of secure, safe and efficient recipe operation mechanism intended to be used as a foundation of RMS.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard covers a definition and usage of extended recipe identification scheme which identifies recipes from multiple aspects including uniqueness and security.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard covers a definition and usage of secured recipe space management mechanism which manages multiple recipe spaces in order to provide logically separated recipe spaces for different security level of recipe operations.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard covers a definition and usage of an equipment status flag which shows whether the equipment is in use for mass production or not.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard covers a definition and usage of recipe feeding mechanism from the host to equipment which enables secure, safe and efficient recipe operation for production execution by the host.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard covers a definition of new recipe space named Production Recipe Cache (PRC) as one of secured recipe space in equipment, which is dedicated for host controlled process execution in which recipes shall be synchronized with the host and shall be protected from modification by unauthorized operations.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard covers definitions of mechanisms and operations which manage PRC so that recipes in PRC are protected from non-privileged access and are consistent with the recipes on the Recipe Server in the host.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard covers a definition and usage of remote access operation mechanism which enables remote access of the recipes on Recipe Server in RMS by using recipe applications on equipment or other workstation.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e \u003cp\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003c\/font\u003e\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003cp\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cp\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eSubordinate Standard:\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eSEMI E170.1-0520 - \u003cspan lang=\"EN\"\u003eSpecification for SECS-II Protocol for Secured Foundation Of Recipe Management System\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cb\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003cb\u003e\u003cbr\u003e\u003c\/b\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003cbr\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003c\/p\u003e\n\u003cp class=\"StdsText\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-bidi-font-weight:\nbold'\u003eSEMI E30 — Specification for the Generic Model for Communications and\nControl of Manufacturing Equipment (GEM)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"StdsText\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-bidi-font-weight:\nbold'\u003eSEMI E39 — Specification for Object Services Standard: Concepts,\nBehavior, and Services\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"StdsText\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-bidi-font-weight:\nbold'\u003eSEMI E40 — Standard for Processing Management\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"StdsText\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;mso-bidi-font-weight:\nbold'\u003eSEMI E87 — Specification for Carrier Management (CMS)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cbr\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI E170-0520 - Current","offer_id":40234250043459,"sku":"13841","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E170-0419 - 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