{"product_id":"e15600-semi-e156-搬送インタフェースに対する450-mm-amhsストッカーの機械的仕様","title":"E15600 - SEMI E156 - 搬送インタフェースに対する450 mm AMHSストッカーの機械的仕様","description":"\u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e本スタンダードは，\u003cspan style=\"COLOR: black\"\u003eglobal Physical Interfaces \u0026amp; Carriers Committee\u003cfont size=\"2\"\u003e\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで技術的に承認されている。現版は\u003cspan style=\"COLOR: black\"\u003e2010\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年\u003cspan style=\"COLOR: black\"\u003e4\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月\u003cspan style=\"COLOR: black\"\u003e30\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e日，\u003cspan style=\"COLOR: black\"\u003eglobal Audits and Reviews Subcommittee\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eにて発行が承認された。\u003cspan style=\"COLOR: black\"\u003e2010\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年\u003cspan style=\"COLOR: black\"\u003e6\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月に\u003cspan style=\"COLOR: black\"\u003ewww.semi.org\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで入手可能となる。\u003cspan style=\"COLOR: black\"\u003e\u003c?xml:namespace prefix = o ns = \"urn:schemas-microsoft-com:office:office\" \/\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp class=\"MsoNormal\" style=\"MARGIN: 0in 0in 0pt\"\u003e\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"COLOR: black\"\u003e\u003co:p\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e \u003ch2 style=\"MARGIN: 3pt 0in; TEXT-INDENT: 0in\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e本仕様は，\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e450 FOUP\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eストッカーのロードポートに対する寸法上の要求事項を定義する。本書の目的は，さまざまなタイプの搬送装置およびストッカーの間の物理的インタフェースを定義する必須の形状と寸法を提供し，工場内での材料取り扱い上のさまざまな要求事項に適合するためにさまざまな自動搬送システムを簡単に使用できるようにすることである。これは，ストッカーと搬送システムの両方が適合しなければならないインタフェースの\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e4\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eつのオプションを定義することで実現する。定義されているオプションは以下のとおりである。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/h2\u003e \u003ch2 style=\"MARGIN: 3pt 0in; TEXT-INDENT: 0in\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003c\/o:p\u003e \u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/h2\u003e \u003cp class=\"Bullet1\" style=\"MARGIN: 3pt 0in 3pt 78.75pt; TEXT-INDENT: -75pt\"\u003e\u003cspan style=\"FONT-FAMILY: Symbol; mso-fareast-font-family: Symbol; mso-fareast-language: JA; mso-bidi-font-family: Symbol\"\u003e\u003cspan style=\"mso-list: Ignore\"\u003e\u003cfont size=\"2\"\u003e·\u003cspan style=\"FONT: 7pt 'Times New Roman'\"\u003e \u003cfont size=\"2\"\u003e\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eオプションA:\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e 能動搬送（能動OHS\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eなど）で内部ストッカーのロードポートに水平にFOUP\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eを移載する。\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e図\u003cspan style=\"mso-fareast-language: JA\"\u003e1\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eにオプション\u003cspan style=\"mso-fareast-language: JA\"\u003eA\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eを示す。\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e \u003cp class=\"Bullet1\" style=\"MARGIN: 3pt 0in 3pt 78.75pt; TEXT-INDENT: -75pt\"\u003e\u003cspan style=\"FONT-FAMILY: Symbol; mso-fareast-font-family: Symbol; mso-fareast-language: JA; mso-bidi-font-family: Symbol\"\u003e\u003cspan style=\"mso-list: Ignore\"\u003e\u003cfont size=\"2\"\u003e·\u003cspan style=\"FONT: 7pt 'Times New Roman'\"\u003e \u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eオプション\u003cspan style=\"mso-fareast-language: JA\"\u003eB:\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e 能動搬送（\u003cspan style=\"mso-fareast-language: JA\"\u003eOHT\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eなど）で，外部ストッカーのロードポートとの間で垂直に\u003cspan style=\"mso-fareast-language: JA\"\u003eFOUP\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eをピック（掬う）またはプレイス（卸す）する。\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eオプションB\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eの概念図を図2\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eに示す。\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e \u003cp class=\"Note\" style=\"MARGIN: 3pt 0in 3pt 60pt; TEXT-ALIGN: center; mso-list: none; tab-stops: .5in; mso-para-margin-left: 6.0gd\" align=\"center\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e注：オプション\u003cspan style=\"mso-fareast-language: JA\"\u003eB\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eの寸法の要求事項は，\u003cspan style=\"mso-fareast-language: JA\"\u003eSEMI E154\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eでカバーしている。\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp class=\"Bullet1\" style=\"MARGIN: 3pt 0in 3pt 78.75pt; TEXT-INDENT: -75pt\"\u003e\u003cspan style=\"COLOR: black; FONT-FAMILY: Symbol; mso-fareast-font-family: Symbol; mso-fareast-language: JA; mso-bidi-font-family: Symbol\"\u003e\u003cspan style=\"mso-list: Ignore\"\u003e\u003cfont size=\"2\"\u003e·\u003cspan style=\"FONT: 7pt 'Times New Roman'\"\u003e \u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eオプション\u003cspan style=\"mso-fareast-language: JA\"\u003eC:\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e 受動搬送（受動\u003cspan style=\"mso-fareast-language: JA\"\u003eOHS\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e，コンベヤなど）で，ストッカーのポート位置との間で\u003cspan style=\"mso-fareast-language: JA\"\u003eFOUP\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eを搬送する。\u003cspan style=\"mso-fareast-language: JA\"\u003eFOUP\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eドアはストッカーに平行である。\u003cspan style=\"COLOR: black\"\u003e図\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e3\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eにオプション\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003eC\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eを示す。\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e \u003cp class=\"Bullet1\" style=\"MARGIN: 3pt 0in 3pt 78.75pt; TEXT-INDENT: -75pt; TEXT-ALIGN: left\" align=\"left\"\u003e\u003cspan style=\"COLOR: black; FONT-FAMILY: Symbol; mso-fareast-font-family: Symbol; mso-fareast-language: JA; mso-bidi-font-family: Symbol\"\u003e\u003cspan style=\"mso-list: Ignore\"\u003e\u003cfont size=\"2\"\u003e·\u003cspan style=\"FONT: 7pt 'Times New Roman'\"\u003e \u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eオプション\u003cspan style=\"mso-fareast-language: JA\"\u003eD:\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e 受動搬送（コンベヤなど）で，内部ストッカーのポート位置との間で\u003cspan style=\"mso-fareast-language: JA\"\u003eFOUP\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eを搬送する。\u003cspan style=\"mso-fareast-language: JA\"\u003eFOUP\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eドアはストッカーに平行である。\u003cspan style=\"COLOR: black\"\u003e図\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e4\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eにオプション\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003eD\u003cspan lang=\"JA\" style=\"COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eを示す。\u003cspan style=\"COLOR: black; mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e \u003cp\u003e \u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI E154 — Mechanical Interface Specification for 450 mm Load Port \u003cbr\u003e SEMI E158 — Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E156-0710 - Superseded","offer_id":40234340220995,"sku":"8135","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_86011133-62fa-434c-924b-a6131e9bfc84.png?v=1776702137","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e15600-semi-e156-%e6%90%ac%e9%80%81%e3%82%a4%e3%83%b3%e3%82%bf%e3%83%95%e3%82%a7%e3%83%bc%e3%82%b9%e3%81%ab%e5%af%be%e3%81%99%e3%82%8b450-mm-amhs%e3%82%b9%e3%83%88%e3%83%83%e3%82%ab%e3%83%bc%e3%81%ae%e6%a9%9f%e6%a2%b0%e7%9a%84%e4%bb%95%e6%a7%98","provider":"SEMI Dev 2","version":"1.0","type":"link"}