{"product_id":"e15400-semi-e154-mechanical-interface-specification-for-450-mm-load-port","title":"E15400 - SEMI E154 - Specification for Mechanical Features of 450 mm Load Port","description":"\u003cfont size=\"2\" face=\"Arial,Arial\"\u003e\u003cfont size=\"2\" face=\"Arial,Arial\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Document is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment (SME), where a 450 FOUP and 450 MAC can be loaded and unloaded. The intention of this Document is to define a set of requirements and features to enable interoperability of load ports and carriers without limiting innovative solutions.\u003c\/p\u003e\n\u003cspan lang=\"EN-GB\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe interface specification in this Document is driven by and intended to mate with a carrier compliant to the relevant SEMI 450 mm FOUP and 450 mm MAC Standards.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eLoading and unloading is assumed to take place in semi-automated and automated mode by using any kind of system or device (i.e., person guided vehicle or overhead hoist vehicle).\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e (purchase separately)\u003cbr\u003e\u003cp\u003eSEMI E63 — Specification for 300 mm Box Opener\/Loader to Tool Standard (BOLTS-M) Interface\u003cbr\u003e SEMI E110 — Guideline for Indicator Placement Zone and Switch Placement Volume of Load Port Operation Interface for 300 mm Load Ports\u003cbr\u003e SEMI E158 — Specification For Mechanical Features of Fab Wafer Carrier Used To Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling\u003c\/p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI E154-0819 - Inactive","offer_id":43106901590083,"sku":"13440","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E154-0814E - Superseded","offer_id":40234271113283,"sku":"3770","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E154-0814 - Superseded","offer_id":40234271178819,"sku":"7794","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E154-0713 - Superseded","offer_id":40234271211587,"sku":"7762","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E154-0612 - Superseded","offer_id":40234271277123,"sku":"7698","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E154-1110 - Superseded","offer_id":40234271342659,"sku":"7627","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E154-0310 - Superseded","offer_id":40234271408195,"sku":"7595","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_fbd49a39-2138-4c10-9e56-71d9e945eb3f.png?v=1776702862","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e15400-semi-e154-mechanical-interface-specification-for-450-mm-load-port","provider":"SEMI Dev 2","version":"1.0","type":"link"}