{"product_id":"e15200-semi-e152-mechanical-specification-of-euv-pod-for-150-mm-euvl-reticles","title":"E15200 - SEMI E152 - Specification for Mechanical Features of EUV Pod for 150 mm EUVL Reticles","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Standard specifies EUV Pod for the 150 mm Extreme Ultraviolet Lithography (EUVL) reticle, used to ship, transport and store a 6-inch reticle. The EUV Pod consists of an outer pod and a protective inner pod. The EUV Pod is to be used when a conventional reticle carrier does not meet the requirements of EUVL.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and their interchangeability at all mechanical interfaces. Many requirements given in this Specification are in the form of maximum or minimum dimensions with very few required surfaces. No material requirements or microcontamination limits are given in this Specification.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eBecause of high attenuation feature of EUV light, a conventional pellicle film cannot be placed in front of EUVL reticles. The inner pod is to protect reticles from particle contamination.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThe EUV Pod has the following components and subcomponents. The baseplate of inner pod has two possible configurations depending on the intended usage. They are designated Type A and Type B. Detail configuration requirements for each are shown in Table 2.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cspan style=\"font-family: arial; font-size: small;\"\u003eExisting specifications for the EUV substrate, blank and reticle are to be followed. Therefore, any requirement specified in this Standard shall not negatively impact performances derived from the specifications in SEMI P37, SEMI P38, and SEMI P40.\u003c\/span\u003e\u003c\/p\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e \u003cp dir=\"ltr\" align=\"left\" style=\"\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont face=\"arial\" size=\"2\"\u003e\u003cb style=\"\"\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003c\/font\u003e\u003cp style=\"\"\u003e\u003c\/p\u003e\n\u003cp class=\"StdsText\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif'\u003e\u003cfont size=\"2\"\u003eSEMI E1.9 —\nMechanical Specification for Cassette Used to Transport and Store 300mm Wafers\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"StdsText\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif'\u003e\u003cfont size=\"2\"\u003eSEMI E19.4 — Specification\nfor 200 mm Standard Mechanical Interface (SMIF)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"StdsText\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif'\u003e\u003cfont size=\"2\"\u003eSEMI E57 — Specification\nfor Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"StdsText\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif'\u003e\u003cfont size=\"2\"\u003eSEMI E100 — Specification\nfor a Reticle SMIF pod (RSP) to Transport and Store 6 Inch or 230mm Reticles\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"StdsText\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif'\u003e\u003cfont size=\"2\"\u003eSEMI P37 —\nSpecification for Extreme Ultraviolet Lithography Mask Substrates\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"StdsText\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif'\u003e\u003cfont size=\"2\"\u003eSEMI P38 —\nSpecification for Absorbing Film Stacks and Multilayers on Extreme Ultraviolet Mask\nBlanks\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"StdsText\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif'\u003e\u003cfont size=\"2\"\u003eSEMI P40 —\nSpecification for Mounting Requirements and Alignment Reference Locations for\nExtreme Ultraviolet Mask\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"StdsText\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif'\u003e\u003cfont size=\"2\"\u003eSEMI T16 —\nSpecification for the use of Data Matrix Symbology for Automated Identification\nof Extreme Ultraviolet Masks\u003c\/font\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cbr\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI E152-0619 - Inactive","offer_id":43106901622851,"sku":"11155","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E152-0214 - Superseded","offer_id":40234253779011,"sku":"3767","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E152-0709 - Superseded","offer_id":40234253811779,"sku":"7497","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_db444dd8-880d-460e-b6e6-be3a921bb23b.png?v=1776702864","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e15200-semi-e152-mechanical-specification-of-euv-pod-for-150-mm-euvl-reticles","provider":"SEMI Dev 2","version":"1.0","type":"link"}