{"product_id":"e15200-semi-e152-150-mm-euvlレチクル用euvポッドの機械仕様","title":"E15200 - SEMI E152 - 150 mm EUVLレチクル用EUVポッドの機械仕様","description":"\u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-family: 'MS PMincho'; mso-no-proof: yes\"\u003e\u003cfont size=\"2\"\u003e本スタンダードは，\u003cfont size=\"2\"\u003e\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-no-proof: yes; mso-fareast-font-family: 'MS Mincho'\"\u003eglobal Physical Interfaces \u0026amp; Carriers Committee\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-family: 'MS PMincho'; mso-no-proof: yes\"\u003eで技術的に承認されている。現版は\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-no-proof: yes; mso-fareast-font-family: 'MS Mincho'\"\u003e2009\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-family: 'MS PMincho'; mso-no-proof: yes\"\u003e年\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-no-proof: yes; mso-fareast-font-family: 'MS Mincho'\"\u003e5\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-family: 'MS PMincho'; mso-no-proof: yes\"\u003e月\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-no-proof: yes; mso-fareast-font-family: 'MS Mincho'\"\u003e13\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-family: 'MS PMincho'; mso-no-proof: yes\"\u003e日，\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-no-proof: yes; mso-fareast-font-family: 'MS Mincho'\"\u003eglobal Audits and Reviews Subcommittee\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-family: 'MS PMincho'; mso-no-proof: yes\"\u003eにて発行が承認された。\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-no-proof: yes; mso-fareast-font-family: 'MS Mincho'\"\u003e2009\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-family: 'MS PMincho'; mso-no-proof: yes\"\u003e年\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-no-proof: yes; mso-fareast-font-family: 'MS Mincho'\"\u003e6\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-family: 'MS PMincho'; mso-no-proof: yes\"\u003e月に\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-no-proof: yes; mso-fareast-font-family: 'MS Mincho'\"\u003ewww.semi.org\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-family: 'MS PMincho'; mso-no-proof: yes\"\u003eで，そして\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-no-proof: yes; mso-fareast-font-family: 'MS Mincho'\"\u003e2009\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-family: 'MS PMincho'; mso-no-proof: yes\"\u003e年\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-no-proof: yes; mso-fareast-font-family: 'MS Mincho'\"\u003e7\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-family: 'MS PMincho'; mso-no-proof: yes\"\u003e月に\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-no-proof: yes; mso-fareast-font-family: 'MS Mincho'\"\u003eCD-ROM\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-hansi-font-family: 'Times New Roman'; mso-bidi-font-family: 'MS PMincho'; mso-no-proof: yes\"\u003eで入手可能となる。\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-fareast-font-family: 'MS Mincho'\"\u003e\u003c?xml:namespace prefix = o ns = \"urn:schemas-microsoft-com:office:office\" \/\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e \u003cp class=\"MsoNormal\" style=\"MARGIN: 0in 0in 0pt\"\u003e\u003cspan style=\"mso-bookmark: OLE_LINK1\"\u003e\u003cspan style=\"mso-fareast-font-family: 'MS Mincho'\"\u003e\u003co:p\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e \u003ch2 style=\"MARGIN: 3pt 0in; TEXT-INDENT: 0in\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'; mso-ansi-language: JA\"\u003e本スタンダードは，6\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'; mso-ansi-language: JA\"\u003eインチレチクルの出荷，搬送，および保管のために使用する150 m\u003cspan lang=\"JA\" style=\"mso-ansi-language: JA\"\u003em\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'; mso-ansi-language: JA\"\u003e極紫外線リソグラフィ（\u003cspan lang=\"JA\" style=\"mso-ansi-language: JA\"\u003eEUVL\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'; mso-ansi-language: JA\"\u003e）レチクル用\u003cspan lang=\"JA\" style=\"mso-ansi-language: JA\"\u003eEUV\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'; mso-ansi-language: JA\"\u003eポッドの仕様を記述している。EUV\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'; mso-ansi-language: JA\"\u003eポッドは，外部ポッドと保護用の内部ポッドから構成される。EUV\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'; mso-ansi-language: JA\"\u003eポッドは，従来のレチクルキャリアがEUVL\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-hansi-font-family: 'Times New Roman'; mso-ascii-font-family: 'Times New Roman'; mso-ansi-language: JA\"\u003eの要件に適合しない場合に使用する。\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/h2\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfonthelv\u003e\u003cfonthelv\u003e \u003cp dir=\"ltr\"\u003e\u003cfonttimes new roman size=\"3\"\u003eSEMI E1.9 — Mechanical Specification for Cassette Used to Transport and Store 300mm Wafers\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfonttimes new roman size=\"3\"\u003eSEMI E19.4 — 200 mm Standard Mechanical Interface (SMIF)\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfonttimes new roman size=\"3\"\u003eSEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfonttimes new roman size=\"3\"\u003eSEMI E100 — Specification for a Reticle SMIF pod (RSP) to Transport and Store 6 Inch or 230mm Reticles\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfonttimes new roman size=\"3\"\u003eSEMI P37 — Specification for Extreme Ultraviolet Lithography Mask Substrates\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfonttimes new roman size=\"3\"\u003eSEMI P38 — Specification for Absorbing Film Stacks and Multilayers on Extreme Ultraviolet Mask Blanks\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfonttimes new roman size=\"3\"\u003eSEMI P40 — Specification for Mounting Requirements and Alignment Reference Locations for Extreme Ultraviolet Mask\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfonttimes new roman size=\"3\"\u003eSEMI T16 — Specification for the use of Data Matrix Symbology for Automated Identification of Extreme Ultraviolet Masks\u003cbr\u003e\u003c\/fonttimes\u003e\u003c\/p\u003e\u003c\/fonttimes\u003e\u003c\/p\u003e\u003c\/fonttimes\u003e\u003c\/p\u003e\u003c\/fonttimes\u003e\u003c\/p\u003e\u003c\/fonttimes\u003e\u003c\/p\u003e\u003c\/fonttimes\u003e\u003c\/p\u003e\u003c\/fonttimes\u003e\u003c\/p\u003e\u003c\/fonttimes\u003e\u003c\/p\u003e\u003c\/fonthelv\u003e\u003c\/fonthelv\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E152-0709 - Superseded","offer_id":40234248896579,"sku":"3768","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_1a586e6b-47b9-43a1-accb-d7357848d747.png?v=1776702863","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e15200-semi-e152-150-mm-euvl%e3%83%ac%e3%83%81%e3%82%af%e3%83%ab%e7%94%a8euv%e3%83%9d%e3%83%83%e3%83%89%e3%81%ae%e6%a9%9f%e6%a2%b0%e4%bb%95%e6%a7%98","provider":"SEMI Dev 2","version":"1.0","type":"link"}