{"product_id":"e14700-semi-e147-guide-for-equipment-data-acquisition-eda","title":"E14700 - SEMI E147 - Guide for Equipment Data Acquisition (EDA)","description":"\u003cp\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eThis standard was technically approved by the global Information \u0026amp; Control Committee. This edition was approved for publication by the global Audits \u0026amp; Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007. \u003c\/font\u003e\u003c\/p\u003e \u003cp\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003c\/font\u003e\u003c\/p\u003e \u003cp\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eE This standard was editorially modified in September 2007 to remove duplicate sections. Changes were made to § 6. \u003c\/font\u003e\u003c\/p\u003e \u003cp\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003c\/font\u003e\u003c\/p\u003e \u003cp\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003eThis guide document provides additional information about the Equipment Data Acquisition (EDA) SEMI Standards suite, explains the relationship among those standards, and presents basic concepts for implementation to ensure the EDA specifications are properly applied. \u003c\/font\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfonthelv\u003e\u003cfonthelv\u003e \u003cp dir=\"ltr\"\u003eSEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II) \u003cbr\u003e \u003c\/p\u003e\n\u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI E39 — Object Services Standard: Concepts, Behavior, and Services\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI E40 — Standard for Processing Management\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI E87 — Specification for Carrier Management (CMS)\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI E90 — Specification for Substrate Tracking\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI E94 — Specification for Control Job Management\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI E116 — Specification for Equipment Performance Tracking (EPT)\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI E120 — Specification for the Common Equipment Model (CEM)\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI E125 — Specification for Equipment Self Description (EqSD)\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI E132 — Specification for Equipment Client Authentication and Authorization\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI E134 — Specification for Data Collection Management (DCM)\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI E138 — XML Semiconductor Common Components\u003cbr\u003e \u003cfont\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/fonthelv\u003e\u003c\/fonthelv\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E147-0307E - Inactive","offer_id":40234323804227,"sku":"5861","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E147-0307 - Superseded","offer_id":40234323935299,"sku":"7284","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_S_3e085e77-65d4-4199-b19a-62f3e21240b5.png?v=1776702324","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e14700-semi-e147-guide-for-equipment-data-acquisition-eda","provider":"SEMI Dev 2","version":"1.0","type":"link"}