{"product_id":"e13500-semi-e135-test-method-for-rf-generators-to-determine-transient-response-for-rf-power-delivery-systems-used-in-semiconductor-processing-equipment","title":"E13500 - SEMI E135 - Test Method for RF Generators to Determine Transient Response for RF Power Delivery Systems Used in Semiconductor Processing Equipment","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Standard defines a test method used to determine the transient response for a radio frequency (RF) generator used in RF power delivery systems for semiconductor processing equipment to support SEMI E113.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Standard specifies the testing procedures and test equipment required for determining the transient response of an RF generator resulting from a requested change in output power. The response is determined for the RF generator operating into a nominal, high- and low-impedance load.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Standard is applicable to RF generators that are designed to deliver power to 50-Ω as well as non-50 Ω-loads.\u003cbr\u003eThe primary focus for this Standard is semiconductor processing equipment including, but not limited to, the following equipment types:\u003cbr\u003e• Dry etch equipment,\u003cbr\u003e• Film deposition equipment (chemical vapor deposition [CVD] and physical vapor deposition [PVD]).\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI E113 — Specification for Semiconductor Processing Equipment RF Power Delivery Systems\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI E135-0918 (Reapproved 0324)\u003cbr\u003eSEMI E138-0319 (technical revision)\u003cbr\u003eSEMI E138-0217 (title change)\u003cbr\u003eSEMI E138-0516 (technical revision)\u003cbr\u003eSEMI E138-0709 (technical revision)\u003cbr\u003eSEMI E138-0309 (technical revision)\u003cbr\u003eSEMI E138-0305 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E135-0918 (Reapproved 0324) - Current","offer_id":43106902245443,"sku":"17462","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E135-0918 - Superseded","offer_id":43106902278211,"sku":"3753","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E135-0704 (Reapproved 0512) - Superseded","offer_id":40234249945155,"sku":"7690","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E135-0704 - Superseded","offer_id":40234250010691,"sku":"7260","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_629e9437-321e-4007-aa01-b73c29df7744.png?v=1776702875","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e13500-semi-e135-test-method-for-rf-generators-to-determine-transient-response-for-rf-power-delivery-systems-used-in-semiconductor-processing-equipment","provider":"SEMI Dev 2","version":"1.0","type":"link"}