{"product_id":"e13300-semi-e133-specification-for-automated-process-control-systems-interface","title":"E13300 - SEMI E133 - Specification for Automated Process Control Systems Interface","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003eIn order to more efficiently facilitate the integration of process control systems (PCS) such as run-to-run (R2R) control, fault detection (FD), fault classification (FC), fault prediction (FP), statistical process control (SPC), etc. into current and future fabs, there is a need to define interfaces for PCS that enable them to interact effectively and share data (1) among themselves and (2) with the other interdependent factory systems (including equipment data collection). This Standard is intended for use by equipment suppliers, semiconductor manufacturers, equipment subsystem suppliers and control system suppliers who will utilize the PCS standards in future developed products.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Standard focuses on defining PCS capabilities, functional groups (FGs), and FG interfaces. The Standard is structured so that new FGs can be added to the Standard through future balloting. The components in this Document include:\u003cbr\u003e• Definitions of key terms and concepts pertinent to this domain,\u003cbr\u003e• Description of the specification conventions used,\u003cbr\u003e• Identification of the major FGs within the scope of PCS,\u003cbr\u003e• Description of the capabilities expected in each FG (required and optional), and\u003cbr\u003e• Definition of interfaces for these FGs, including:\u003cbr\u003e• Data that is available across these interfaces. This includes the interface data descriptions (inputs and outputs). Future enhancements to this \u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eSpecification will include detailed data structures in the form of inheritance and aggregation models that are common to all PCS FGs, as well as specific models for each,\u003cbr\u003e• Services supported and Interface behavior assumed, and\u003cbr\u003e• Description of an approach for compliance verification testing.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThe specific format and protocol implementation of these interface specifications, which are technology specific, will be delineated in supporting ‘dot’ specifications to this Standard. As an example a possible format is eXtensible markup language (XML) (which would include data type definitions and metamodel schemas).\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eIn addition to the information embodied in this Standard, the Standard describes a validation process to identify and address real implementation issues as early as possible.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eSubordinate Standards (included)\u003cbr\u003eSEMI E133.1 — Specification for XML Messaging for Process Control System (PCS)\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI E121 — Guide for Style and Usage of XML for Semiconductor Manufacturing Applications\u003cbr\u003eSEMI E125 — Specification for Equipment Self Description (EqSD)\u003cbr\u003eSEMI E134 — Specification for Data Collection Management\u003cbr\u003eSEMI E148 — Specification for Time Synchronization and Definition of the TS-Clock Object\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI E133-0524 (technical revision)\u003cbr\u003eSEMI E133-1218 (Reapproved 0324)\u003cbr\u003eSEMI E133-1218 (technical revision)\u003cbr\u003eSEMI E133-0318 (technical revision)\u003cbr\u003eSEMI E133-1014 (technical revision)\u003cbr\u003eSEMI E133-0212 (technical revision)\u003cbr\u003eSEMI E133-1110 (technical revision)\u003cbr\u003eSEMI E133-1109 (technical revision)\u003cbr\u003eSEMI E133-1108 (technical revision)\u003cbr\u003eSEMI E133-0708 (technical revision)\u003cbr\u003eSEMI E133-1107 (technical revision)\u003cbr\u003eSEMI E133-0707 (technical revision)\u003cbr\u003eSEMI E133-0307 (technical revision)\u003cbr\u003eSEMI E133-0306 (designation  update)\u003cbr\u003eSEMI E133-0705 (technical revision)\u003cbr\u003eSEMI E133-1104 (technical revision)\u003cbr\u003eSEMI E133-0704 (technical revision)\u003cbr\u003eSEMI E133-0304 (first published)\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eSEMI E133.1-0324 (Reapproved 0524)\u003cbr\u003eSEMI E133.1-0318 (Reapproved 0324)\u003cbr\u003eSEMI E133.1-0318 (technical revision)\u003cbr\u003eSEMI E133.1-1107 (technical revision)\u003cbr\u003eSEMI E133.1-0306 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E133-0524 - 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