{"product_id":"e11700-semi-e117-specification-for-reticle-load-port","title":"E11700 - SEMI E117 - Specification for Reticle Load Port","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eNOTICE: \u003c\/strong\u003eThis Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Specification defines dimensional requirements and options of reticle load ports on reticle stockers, lithography exposure equipment, and reticle inspection equipment. It is intended to promote a uniform physical interface between equipment and the factory, to facilitate the use of automated RSP transport systems, and\/or to meet ergonomic requirements for manually loaded equipment.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Standard covers only load ports for reticle SMIF pods (RSPs) as specified in SEMI E100, SEMI E111, and SEMI E112. Similar requirements and options covering load ports for wafers are covered in SEMI E15 (for 200 mm wafers and smaller) and in SEMI E15.1 (for 300 mm wafers).\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI E15 — Specification for Tool Load Port\u003cbr\u003eSEMI E15.1 — Specification for 300 mm Tool Load Port\u003cbr\u003eSEMI E19.3 — Standard Mechanical Interface (SMIF), Specification for 150 mm (6 inch) Port\u003cbr\u003eSEMI E19.4 — 200 mm Standard Mechanical Interface (SMIF)\u003cbr\u003eSEMI E100 — Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 inch or 230 mm Reticles\u003cbr\u003eSEMI E111 — Mechanical Specification for a 150mm Reticle SMIF Pod (RSP150) Used to Transport and Store a 6 Inch Reticle\u003cbr\u003eSEMI E112 — Mechanical Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store 6 Inch Reticles\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI E117-0117 (technical revision)\u003cbr\u003eSEMI E117-1104 (Reapproved 0816)\u003cbr\u003eSEMI E117-1104 (Reapproved 0710)\u003cbr\u003eSEMI E117-1104 (technical revision)\u003cbr\u003eSEMI E117-0303 (technical revision)\u003cbr\u003eSEMI E117-1102 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E117-0117 - Inactive","offer_id":43106903883843,"sku":"3733","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E117-1104 (Reapproved 0816) - Superseded","offer_id":40234268196931,"sku":"7823","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E117-1104 (Reapproved 0710) - Superseded","offer_id":40234268393539,"sku":"7614","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E117-1104 - Superseded","offer_id":40234268590147,"sku":"7200","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E117-0303 - Superseded","offer_id":40234268885059,"sku":"7824","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E117-1102 - Superseded","offer_id":40234269048899,"sku":"7825","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_e50b77dc-8ea4-44d2-81b4-902e5008f01f.png?v=1776702890","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e11700-semi-e117-specification-for-reticle-load-port","provider":"SEMI Dev 2","version":"1.0","type":"link"}