{"product_id":"e11700-semi-e117-レチクルロードポートの仕様","title":"E11700 - SEMI E117 - レチクルロードポートの仕様","description":"\u003cp class=\"Indent\" style=\"MARGIN: 0pt 21pt\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e本スタンダードは，\u003cspan style=\"FONT-SIZE: 10pt\"\u003eglobal Physical Interfaces and Carriers Committee\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで\u003cspan style=\"COLOR: black\"\u003e技術的に承認されている。現版は\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black\"\u003e2010\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black\"\u003e4\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black\"\u003e30\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e日，\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black\"\u003eglobal Audits and Reviews Subcommittee\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eにて発行が承認された。\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black\"\u003e2010\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black\"\u003e6\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003e月に\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black\"\u003ewww.semi.org\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'\"\u003eで入手可能となる。\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e初版は\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e2002\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e11\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月発行，前版は\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e2004\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e11\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月発行。\u003cspan style=\"FONT-SIZE: 10pt; mso-fareast-language: JA\"\u003e\u003c?xml:namespace prefix = o ns = \"urn:schemas-microsoft-com:office:office\" \/\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e \u003cp class=\"MsoNormal\" style=\"MARGIN: 0pt\"\u003e\u003cspan style=\"FONT-SIZE: 10pt\"\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \u003ch2 style=\"MARGIN: 3pt 0pt; mso-list: none\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-no-proof: yes\"\u003eこの仕様は，レチクルストッカー，リソグラフィー露光機器，レチクル検査装置のレチクルロードポートの寸法の要求条件およびオプションを定義する。装置と工場間の物理インタフェースの共通化を促進し，自動化された\u003cspan style=\"mso-fareast-language: JA; mso-no-proof: yes\"\u003eRSP\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-no-proof: yes\"\u003e搬送システムを使いやすくし，手動ロード装置の人間工学的要求条件を満たすことを目的とする。\u003cspan style=\"mso-fareast-language: JA; mso-no-proof: yes\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/h2\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eSEMI E15 — Specification for Tool Load Port\u003cbr\u003eSEMI E15.1 — Specification for 300 mm Tool Load Port\u003cbr\u003eSEMI E19.3 — Standard Mechanical Interface (SMIF), Specification for 150 mm (6 inch) Port\u003cbr\u003eSEMI E19.4 — 200 mm Standard Mechanical Interface (SMIF)\u003cbr\u003eSEMI E72 — Specification and Guide for 300 mm Equipment Footprint, Height, and Weight\u003cbr\u003eSEMI E100 — Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 inch or 230 mm Reticles\u003cbr\u003eSEMI E111 — Mechanical Specification for a 150mm Reticle SMIF Pod (RSP150) Used to Transport and Store a 6 Inch Reticle\u003cbr\u003eSEMI E112 — Mechanical Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store 6 Inch Reticles \u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E117-1104 (Reapproved 0710) - Superseded","offer_id":40234339336259,"sku":"8082","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_3151d93c-93e5-4724-8711-845306b6ef8c.png?v=1776702155","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e11700-semi-e117-%e3%83%ac%e3%83%81%e3%82%af%e3%83%ab%e3%83%ad%e3%83%bc%e3%83%89%e3%83%9d%e3%83%bc%e3%83%88%e3%81%ae%e4%bb%95%e6%a7%98","provider":"SEMI Dev 2","version":"1.0","type":"link"}