{"product_id":"e11000-semi-e110-guideline-for-indicator-placement-zone-and-switch-placement-volume-of-load-port-operation-interface-for-300-mm-load-ports","title":"E11000 - SEMI E110 - Guideline for Indicator Placement Zone and Switch Placement Volume of Load Port Operation Interface for 300 mm Load Ports","description":"\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eThis guideline defines the zones and volumes in which load port status indicators and load port operation switches should be placed. The purpose of this guideline is to give a similarity in the placement of them on a 300 mm load port. This guideline only defines the zones and volumes for them and the exact placement of them within these zone and volumes are at the direction of the load port suppliers.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eThe zones or volumes may be defined more precisely by standardization improvement on load port design and good unification of load port operation among device manufactures. This guideline may be improved to be a specification after this effort.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH1\"\u003e\u003cbr\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eThis guideline defines following recommended specifications for 300 mm load port.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsListBulleted\" style=\"text-indent: 0in;\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e• Indicator placement zone in which load port status indicators should be placed.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsListBulleted\" style=\"text-indent: 0in;\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e• Switch placement volume in which load port operation switch should be placed.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eThis guideline covers the specifications for both fixed buffer equipment and internal buffer equipment.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eThis guideline is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. Only the physical interfaces for the load port are specified; no materials requirements, micro-contamination limits, use of or logic associated with the defined physical features are given in this Specification.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003cspan style='font-family: \"Microsoft Sans Serif\"; font-size: small;'\u003e　\u003c\/span\u003e\u003c\/p\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp class=\"StdsText\" style=\"\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003eSEMI E15 — Specification for Tool Load Port\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp class=\"StdsText\" style=\"\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003eSEMI E15.1 — Specification for 300 mm Tool Load Port\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp class=\"StdsText\" style=\"\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003eSEMI E47.1 — Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp class=\"StdsText\" style=\"\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003eSEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp class=\"StdsText\" style=\"\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003eSEMI E87 — Specification for Carrier Management (CMS)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp class=\"StdsText\" style=\"\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003eSEMI E101 — Guide for EFEM Functional Structure Model\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp class=\"MsoNormal\" style=\"\"\u003e\u003cspan style=\"line-height: 14.2667px; font-family: Arial, sans-serif;\"\u003e\u003co:p style=\"\"\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI E110-1102 (Reapproved 0709) - Inactive","offer_id":40234319151171,"sku":"5846","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E110-1102 - Superseded","offer_id":40234319249475,"sku":"7183","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_690224e6-8efa-49b9-80b3-0cc9081cdc1e.png?v=1776702334","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e11000-semi-e110-guideline-for-indicator-placement-zone-and-switch-placement-volume-of-load-port-operation-interface-for-300-mm-load-ports","provider":"SEMI Dev 2","version":"1.0","type":"link"}