{"product_id":"e10900-semi-e109-specification-for-reticle-and-pod-management-rpms","title":"E10900 - SEMI E109 - Specification for Reticle and Pod Management (RPMS)","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThis Specification provides standardized behavior for lithography, reticle inspection, and bare reticle stocker equipment. It also provides for standardized communication with lithography, reticle inspection, and bare reticle stocker equipment. This includes the coordination, execution, and completion of automated and manual reticle pod transfers to and from the equipment, transfer of reticles to and from the reticle pods, movement of the reticles within the equipment, identification and verification of both reticle pods and reticles, inspection and qualification of reticles, and other relevant information such as tracking reticle usage.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThis Standard covers host and equipment communication for equipment that handles reticles. This only includes equipment that handles reticles both in and outside of a reticle pod.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThis Specification defines standards that facilitate the host’s knowledge and role in automated and manual reticle pod transfers, reticle transfers to and from the reticle pod, internal reticle movement, identification, and verification of ReticleID, inspection and qualification of reticles, and tracking reticle usage. Specifically, this Specification provides state models and scenarios that define the host interaction with the equipment for the following:\u003c\/span\u003e\u003c\/p\u003e\u003cul\u003e\n\u003cli\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eReticle pod transfer between AMHS vehicles and production equipment, bare reticle stockers, and reticle inspection equipment reticle load ports.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eReticle transfers to\/from lithography production equipment internal reticle library space.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eEquipment and reticle load port access mode switching.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eReticle Pod to load port association.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eReticle Pod ID verification and Reticle Pod slot map verification.\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSubordinate Standards (included)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E109.1-1110 (Reapproved 0623) — Specification for SECS-II Protocol for Reticle and Pod Management (RPMS)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E39 — Object Services Standard: Concept, Behavior, and Services\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E84 — Specification for Enhanced Carrier Handoff Parallel I\/O Interface\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E109-1017 (Reapproved 0623)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E109-1017 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E109-1110 (designation update)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E109-0305 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E109-1104 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E109-0704 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E109-0703 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E109-1102 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E109-0302 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E109-0701 (first published)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E109.1-1110 (Reapproved 0623)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E109.1-1110 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E109.1-0704 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E109.1-0703 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E109.1-1102 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E109.1-0302 (first published)\u003c\/span\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E109-1017 (Reapproved 0623) - 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