{"product_id":"e10800-semi-e108-test-method-for-the-assessment-of-outgassing-organic-contamination-from-minienvironments-using-gas-chromatography-mass-spectroscopy","title":"E10800 - SEMI E108 - Test Method for the Assessment of Outgassing Organic Contamination from Minienvironments Using Gas Chromatography\/Mass Spectroscopy","description":"\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eThe purpose of this Standard is to define a test method for the determination of the outgassing organic contamination from minienvironments used for storage and transport of wafers using gas chromatography\/mass spectroscopy (GC\/MS).\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eThis Test Method is intended as an alternative to SEMI E46. The main difference between SEMI E46 and this Document is that SEMI E46 defines a test method which is based on ion mobility spectroscopy (IMS) as the measurement technique while this Standard is based on GC\/MS in combination with thermal desorption. Additionally, this Test Method provides a procedure for testing the outgassing of organic compounds in a complete minienvironment. The results of SEMI E46 and this Document are given in different units.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH1\"\u003e\u003cbr\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eThe test method provided in this Document is applicable to the assessment of the outgassing of organic contamination from minienvironments.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eGC\/MS is chosen as the method to determine organic contamination because it is commonly used for characterization and quantification of organic compounds. In combination with thermal desorption, it provides a method for the identification of organic compounds in the atmosphere (i.e., inside the minienvironment) as well as directly from source materials, and transferred contaminants. This method can also be used to evaluate materials and processes used in semiconductor industry.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eThis Test Method is based on ASTM F1982.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e　\u003c\/p\u003e\u003cfont face=\"arial\" size=\"2\"\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003c\/font\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eSEMI E46 — Test Method for the Determination of Organic Contamination from Minienvironments\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eSEMI F21 — Classification of Airborne Molecular Contaminant Levels in Clean Environments\u003c\/font\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"font-size: 10pt; line-height: 14.2667px; font-family: Arial, sans-serif;\"\u003e \u003c\/span\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E108-0307 - Inactive","offer_id":40234327572547,"sku":"5845","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E108-0301 - Superseded","offer_id":40234327736387,"sku":"7180","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_d72cbb27-5130-4cfb-b888-6b9cafd7c9a8.png?v=1776702335","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e10800-semi-e108-test-method-for-the-assessment-of-outgassing-organic-contamination-from-minienvironments-using-gas-chromatography-mass-spectroscopy","provider":"SEMI Dev 2","version":"1.0","type":"link"}